2/14/2013	9:43:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	9:43:11 AM	Recipe started at 9:43 AM
2/14/2013	9:43:11 AM	Helium valve closed
2/14/2013	9:43:11 AM	H2 valve closed
2/14/2013	9:43:11 AM	BCl3 valve closed
2/14/2013	9:43:11 AM	PH3 valve closed
2/14/2013	9:43:11 AM	SiCl4 pre valve closed
2/14/2013	9:43:11 AM	SiCl4 post valve closed
2/14/2013	9:43:11 AM	Main Vac valve closed
2/14/2013	9:43:11 AM	Bypass valve closed
2/14/2013	9:43:11 AM	Bubbler valve closed
2/14/2013	9:43:11 AM	Helium MFC set to  0.000000
2/14/2013	9:43:11 AM	H2 MFC set to  0.000000
2/14/2013	9:43:11 AM	BCl3 MFC set to  0.000000
2/14/2013	9:43:11 AM	PH3 MFC set to  0.000000
2/14/2013	9:43:11 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:43:11 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:43:11 AM	Tube furnace set to 0
2/14/2013	9:43:14 AM	H2 valve closed
2/14/2013	9:43:14 AM	BCl3 valve closed
2/14/2013	9:43:14 AM	PH3 valve closed
2/14/2013	9:43:14 AM	SiCl4 pre valve closed
2/14/2013	9:43:14 AM	SiCl4 post valve closed
2/14/2013	9:43:14 AM	Main Vac valve closed
2/14/2013	9:43:14 AM	Bypass valve closed
2/14/2013	9:43:14 AM	Bubbler valve closed
2/14/2013	9:43:14 AM	Helium valve opened
2/14/2013	9:43:14 AM	Helium MFC set to  500.000000
2/14/2013	9:43:14 AM	H2 MFC set to  0.000000
2/14/2013	9:43:14 AM	BCl3 MFC set to  0.000000
2/14/2013	9:43:14 AM	PH3 MFC set to  0.000000
2/14/2013	9:43:14 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:43:14 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:43:14 AM	Tube furnace set to 0
2/14/2013	9:44:27 AM	Helium valve closed
2/14/2013	9:44:27 AM	H2 valve closed
2/14/2013	9:44:27 AM	BCl3 valve closed
2/14/2013	9:44:27 AM	PH3 valve closed
2/14/2013	9:44:27 AM	SiCl4 pre valve closed
2/14/2013	9:44:27 AM	SiCl4 post valve closed
2/14/2013	9:44:27 AM	Main Vac valve closed
2/14/2013	9:44:27 AM	Bypass valve closed
2/14/2013	9:44:27 AM	Bubbler valve closed
2/14/2013	9:44:27 AM	Helium MFC set to  0.000000
2/14/2013	9:44:27 AM	H2 MFC set to  0.000000
2/14/2013	9:44:27 AM	BCl3 MFC set to  0.000000
2/14/2013	9:44:27 AM	PH3 MFC set to  0.000000
2/14/2013	9:44:27 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:44:27 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:44:27 AM	Tube furnace set to 0
2/14/2013	9:44:28 AM	Run finished at 9:44 AM
2/14/2013	9:44:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	9:52:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	9:52:32 AM	Recipe started at 9:52 AM
2/14/2013	9:52:33 AM	Helium valve closed
2/14/2013	9:52:33 AM	H2 valve closed
2/14/2013	9:52:33 AM	BCl3 valve closed
2/14/2013	9:52:33 AM	PH3 valve closed
2/14/2013	9:52:33 AM	SiCl4 pre valve closed
2/14/2013	9:52:33 AM	SiCl4 post valve closed
2/14/2013	9:52:33 AM	Main Vac valve closed
2/14/2013	9:52:33 AM	Bubbler valve closed
2/14/2013	9:52:33 AM	Bypass valve opened
2/14/2013	9:52:33 AM	Helium MFC set to  0.000000
2/14/2013	9:52:33 AM	H2 MFC set to  0.000000
2/14/2013	9:52:33 AM	BCl3 MFC set to  0.000000
2/14/2013	9:52:33 AM	PH3 MFC set to  0.000000
2/14/2013	9:52:33 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:52:33 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:52:33 AM	Tube furnace set to 0
2/14/2013	9:53:50 AM	Helium valve closed
2/14/2013	9:53:50 AM	H2 valve closed
2/14/2013	9:53:50 AM	BCl3 valve closed
2/14/2013	9:53:50 AM	PH3 valve closed
2/14/2013	9:53:50 AM	SiCl4 pre valve closed
2/14/2013	9:53:50 AM	SiCl4 post valve closed
2/14/2013	9:53:50 AM	Main Vac valve closed
2/14/2013	9:53:50 AM	Bubbler valve closed
2/14/2013	9:53:50 AM	Bypass valve opened
2/14/2013	9:53:50 AM	Helium MFC set to  0.000000
2/14/2013	9:53:50 AM	H2 MFC set to  0.000000
2/14/2013	9:53:50 AM	BCl3 MFC set to  0.000000
2/14/2013	9:53:50 AM	PH3 MFC set to  0.000000
2/14/2013	9:53:50 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:53:50 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:53:50 AM	Tube furnace set to 0
2/14/2013	9:54:50 AM	Helium valve closed
2/14/2013	9:54:50 AM	H2 valve closed
2/14/2013	9:54:50 AM	BCl3 valve closed
2/14/2013	9:54:50 AM	PH3 valve closed
2/14/2013	9:54:50 AM	SiCl4 pre valve closed
2/14/2013	9:54:50 AM	SiCl4 post valve closed
2/14/2013	9:54:50 AM	Bypass valve closed
2/14/2013	9:54:50 AM	Bubbler valve closed
2/14/2013	9:54:50 AM	Main Vac valve opened
2/14/2013	9:54:50 AM	Helium MFC set to  0.000000
2/14/2013	9:54:50 AM	H2 MFC set to  0.000000
2/14/2013	9:54:50 AM	BCl3 MFC set to  0.000000
2/14/2013	9:54:50 AM	PH3 MFC set to  0.000000
2/14/2013	9:54:50 AM	SiCl4 MFC set to  0.000000
2/14/2013	9:54:50 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	9:54:50 AM	Tube furnace set to 0
2/14/2013	9:54:51 AM	Run finished at 9:54 AM
2/14/2013	9:54:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	9:55:00 AM	Tube furnace set to 200
2/14/2013	10:06:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	10:06:30 AM	Recipe started at 10:06 AM
2/14/2013	10:06:30 AM	Helium valve closed
2/14/2013	10:06:30 AM	H2 valve closed
2/14/2013	10:06:30 AM	BCl3 valve closed
2/14/2013	10:06:30 AM	PH3 valve closed
2/14/2013	10:06:30 AM	SiCl4 pre valve closed
2/14/2013	10:06:30 AM	SiCl4 post valve closed
2/14/2013	10:06:30 AM	Main Vac valve closed
2/14/2013	10:06:30 AM	Bubbler valve closed
2/14/2013	10:06:30 AM	Bypass valve opened
2/14/2013	10:06:30 AM	Helium MFC set to  0.000000
2/14/2013	10:06:30 AM	H2 MFC set to  0.000000
2/14/2013	10:06:30 AM	BCl3 MFC set to  0.000000
2/14/2013	10:06:30 AM	PH3 MFC set to  0.000000
2/14/2013	10:06:30 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:06:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:06:30 AM	Tube furnace set to 0
2/14/2013	10:06:30 AM	Helium valve closed
2/14/2013	10:06:30 AM	H2 valve closed
2/14/2013	10:06:30 AM	BCl3 valve closed
2/14/2013	10:06:30 AM	PH3 valve closed
2/14/2013	10:06:30 AM	SiCl4 pre valve closed
2/14/2013	10:06:30 AM	SiCl4 post valve closed
2/14/2013	10:06:30 AM	Main Vac valve closed
2/14/2013	10:06:30 AM	Bubbler valve closed
2/14/2013	10:06:30 AM	Bypass valve opened
2/14/2013	10:06:30 AM	Helium MFC set to  0.000000
2/14/2013	10:06:30 AM	H2 MFC set to  0.000000
2/14/2013	10:06:30 AM	BCl3 MFC set to  0.000000
2/14/2013	10:06:30 AM	PH3 MFC set to  0.000000
2/14/2013	10:06:30 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:06:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:06:31 AM	Tube furnace set to 0
2/14/2013	10:07:01 AM	Helium valve closed
2/14/2013	10:07:01 AM	H2 valve closed
2/14/2013	10:07:01 AM	BCl3 valve closed
2/14/2013	10:07:01 AM	PH3 valve closed
2/14/2013	10:07:01 AM	SiCl4 pre valve closed
2/14/2013	10:07:01 AM	SiCl4 post valve closed
2/14/2013	10:07:01 AM	Bypass valve closed
2/14/2013	10:07:01 AM	Bubbler valve closed
2/14/2013	10:07:01 AM	Main Vac valve opened
2/14/2013	10:07:01 AM	Helium MFC set to  0.000000
2/14/2013	10:07:01 AM	H2 MFC set to  0.000000
2/14/2013	10:07:01 AM	BCl3 MFC set to  0.000000
2/14/2013	10:07:01 AM	PH3 MFC set to  0.000000
2/14/2013	10:07:01 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:07:01 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:07:01 AM	Tube furnace set to 0
2/14/2013	10:07:31 AM	H2 valve closed
2/14/2013	10:07:31 AM	BCl3 valve closed
2/14/2013	10:07:31 AM	PH3 valve closed
2/14/2013	10:07:31 AM	SiCl4 pre valve closed
2/14/2013	10:07:31 AM	SiCl4 post valve closed
2/14/2013	10:07:31 AM	Bypass valve closed
2/14/2013	10:07:31 AM	Bubbler valve closed
2/14/2013	10:07:31 AM	Helium valve opened
2/14/2013	10:07:31 AM	Main Vac valve opened
2/14/2013	10:07:31 AM	Helium MFC set to  20.000000
2/14/2013	10:07:31 AM	H2 MFC set to  0.000000
2/14/2013	10:07:31 AM	BCl3 MFC set to  0.000000
2/14/2013	10:07:31 AM	PH3 MFC set to  0.000000
2/14/2013	10:07:31 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:07:31 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:07:31 AM	Tube furnace set to 0
2/14/2013	10:08:01 AM	Helium valve closed
2/14/2013	10:08:01 AM	H2 valve closed
2/14/2013	10:08:01 AM	BCl3 valve closed
2/14/2013	10:08:01 AM	PH3 valve closed
2/14/2013	10:08:01 AM	SiCl4 pre valve closed
2/14/2013	10:08:01 AM	SiCl4 post valve closed
2/14/2013	10:08:01 AM	Bypass valve closed
2/14/2013	10:08:01 AM	Bubbler valve closed
2/14/2013	10:08:01 AM	Main Vac valve opened
2/14/2013	10:08:01 AM	Helium MFC set to  0.000000
2/14/2013	10:08:01 AM	H2 MFC set to  0.000000
2/14/2013	10:08:01 AM	BCl3 MFC set to  0.000000
2/14/2013	10:08:01 AM	PH3 MFC set to  0.000000
2/14/2013	10:08:01 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:08:01 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:08:01 AM	Tube furnace set to 0
2/14/2013	10:08:31 AM	H2 valve closed
2/14/2013	10:08:31 AM	BCl3 valve closed
2/14/2013	10:08:31 AM	PH3 valve closed
2/14/2013	10:08:31 AM	SiCl4 pre valve closed
2/14/2013	10:08:31 AM	SiCl4 post valve closed
2/14/2013	10:08:31 AM	Bypass valve closed
2/14/2013	10:08:31 AM	Bubbler valve closed
2/14/2013	10:08:31 AM	Helium valve opened
2/14/2013	10:08:31 AM	Main Vac valve opened
2/14/2013	10:08:31 AM	Helium MFC set to  20.000000
2/14/2013	10:08:31 AM	H2 MFC set to  0.000000
2/14/2013	10:08:31 AM	BCl3 MFC set to  0.000000
2/14/2013	10:08:31 AM	PH3 MFC set to  0.000000
2/14/2013	10:08:31 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:08:31 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:08:32 AM	Tube furnace set to 0
2/14/2013	10:09:02 AM	Helium valve closed
2/14/2013	10:09:02 AM	H2 valve closed
2/14/2013	10:09:02 AM	BCl3 valve closed
2/14/2013	10:09:02 AM	PH3 valve closed
2/14/2013	10:09:02 AM	SiCl4 pre valve closed
2/14/2013	10:09:02 AM	SiCl4 post valve closed
2/14/2013	10:09:02 AM	Bypass valve closed
2/14/2013	10:09:02 AM	Bubbler valve closed
2/14/2013	10:09:02 AM	Main Vac valve opened
2/14/2013	10:09:02 AM	Helium MFC set to  0.000000
2/14/2013	10:09:02 AM	H2 MFC set to  0.000000
2/14/2013	10:09:02 AM	BCl3 MFC set to  0.000000
2/14/2013	10:09:02 AM	PH3 MFC set to  0.000000
2/14/2013	10:09:02 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:09:02 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:09:02 AM	Tube furnace set to 0
2/14/2013	10:09:32 AM	H2 valve closed
2/14/2013	10:09:32 AM	BCl3 valve closed
2/14/2013	10:09:32 AM	PH3 valve closed
2/14/2013	10:09:32 AM	SiCl4 pre valve closed
2/14/2013	10:09:32 AM	SiCl4 post valve closed
2/14/2013	10:09:32 AM	Bypass valve closed
2/14/2013	10:09:32 AM	Bubbler valve closed
2/14/2013	10:09:32 AM	Helium valve opened
2/14/2013	10:09:32 AM	Main Vac valve opened
2/14/2013	10:09:32 AM	Helium MFC set to  20.000000
2/14/2013	10:09:32 AM	H2 MFC set to  0.000000
2/14/2013	10:09:32 AM	BCl3 MFC set to  0.000000
2/14/2013	10:09:32 AM	PH3 MFC set to  0.000000
2/14/2013	10:09:32 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:09:32 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:09:32 AM	Tube furnace set to 0
2/14/2013	10:10:02 AM	Helium valve closed
2/14/2013	10:10:02 AM	H2 valve closed
2/14/2013	10:10:02 AM	BCl3 valve closed
2/14/2013	10:10:02 AM	PH3 valve closed
2/14/2013	10:10:02 AM	SiCl4 pre valve closed
2/14/2013	10:10:02 AM	SiCl4 post valve closed
2/14/2013	10:10:02 AM	Bypass valve closed
2/14/2013	10:10:02 AM	Bubbler valve closed
2/14/2013	10:10:02 AM	Main Vac valve opened
2/14/2013	10:10:02 AM	Helium MFC set to  0.000000
2/14/2013	10:10:02 AM	H2 MFC set to  0.000000
2/14/2013	10:10:02 AM	BCl3 MFC set to  0.000000
2/14/2013	10:10:02 AM	PH3 MFC set to  0.000000
2/14/2013	10:10:02 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:10:02 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:10:02 AM	Tube furnace set to 0
2/14/2013	10:10:32 AM	H2 valve closed
2/14/2013	10:10:32 AM	BCl3 valve closed
2/14/2013	10:10:32 AM	PH3 valve closed
2/14/2013	10:10:32 AM	SiCl4 pre valve closed
2/14/2013	10:10:32 AM	SiCl4 post valve closed
2/14/2013	10:10:32 AM	Bypass valve closed
2/14/2013	10:10:32 AM	Bubbler valve closed
2/14/2013	10:10:32 AM	Helium valve opened
2/14/2013	10:10:32 AM	Main Vac valve opened
2/14/2013	10:10:32 AM	Helium MFC set to  20.000000
2/14/2013	10:10:32 AM	H2 MFC set to  0.000000
2/14/2013	10:10:32 AM	BCl3 MFC set to  0.000000
2/14/2013	10:10:32 AM	PH3 MFC set to  0.000000
2/14/2013	10:10:32 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:10:32 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:10:33 AM	Tube furnace set to 0
2/14/2013	10:11:03 AM	Helium valve closed
2/14/2013	10:11:03 AM	H2 valve closed
2/14/2013	10:11:03 AM	BCl3 valve closed
2/14/2013	10:11:03 AM	PH3 valve closed
2/14/2013	10:11:03 AM	SiCl4 pre valve closed
2/14/2013	10:11:03 AM	SiCl4 post valve closed
2/14/2013	10:11:03 AM	Bypass valve closed
2/14/2013	10:11:03 AM	Bubbler valve closed
2/14/2013	10:11:03 AM	Main Vac valve opened
2/14/2013	10:11:03 AM	Helium MFC set to  0.000000
2/14/2013	10:11:03 AM	H2 MFC set to  0.000000
2/14/2013	10:11:03 AM	BCl3 MFC set to  0.000000
2/14/2013	10:11:03 AM	PH3 MFC set to  0.000000
2/14/2013	10:11:03 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:11:03 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:11:03 AM	Tube furnace set to 0
2/14/2013	10:11:33 AM	H2 valve closed
2/14/2013	10:11:33 AM	BCl3 valve closed
2/14/2013	10:11:33 AM	PH3 valve closed
2/14/2013	10:11:33 AM	SiCl4 pre valve closed
2/14/2013	10:11:33 AM	SiCl4 post valve closed
2/14/2013	10:11:33 AM	Bypass valve closed
2/14/2013	10:11:33 AM	Bubbler valve closed
2/14/2013	10:11:33 AM	Helium valve opened
2/14/2013	10:11:33 AM	Main Vac valve opened
2/14/2013	10:11:33 AM	Helium MFC set to  20.000000
2/14/2013	10:11:33 AM	H2 MFC set to  0.000000
2/14/2013	10:11:33 AM	BCl3 MFC set to  0.000000
2/14/2013	10:11:33 AM	PH3 MFC set to  0.000000
2/14/2013	10:11:33 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:11:33 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:11:33 AM	Tube furnace set to 0
2/14/2013	10:12:03 AM	Helium valve closed
2/14/2013	10:12:03 AM	H2 valve closed
2/14/2013	10:12:03 AM	BCl3 valve closed
2/14/2013	10:12:03 AM	PH3 valve closed
2/14/2013	10:12:03 AM	SiCl4 pre valve closed
2/14/2013	10:12:03 AM	SiCl4 post valve closed
2/14/2013	10:12:03 AM	Bypass valve closed
2/14/2013	10:12:03 AM	Bubbler valve closed
2/14/2013	10:12:03 AM	Main Vac valve opened
2/14/2013	10:12:03 AM	Helium MFC set to  0.000000
2/14/2013	10:12:03 AM	H2 MFC set to  0.000000
2/14/2013	10:12:03 AM	BCl3 MFC set to  0.000000
2/14/2013	10:12:03 AM	PH3 MFC set to  0.000000
2/14/2013	10:12:03 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:12:03 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:12:03 AM	Tube furnace set to 0
2/14/2013	10:12:33 AM	H2 valve closed
2/14/2013	10:12:33 AM	BCl3 valve closed
2/14/2013	10:12:33 AM	PH3 valve closed
2/14/2013	10:12:33 AM	SiCl4 pre valve closed
2/14/2013	10:12:33 AM	SiCl4 post valve closed
2/14/2013	10:12:33 AM	Bypass valve closed
2/14/2013	10:12:33 AM	Bubbler valve closed
2/14/2013	10:12:33 AM	Helium valve opened
2/14/2013	10:12:33 AM	Main Vac valve opened
2/14/2013	10:12:33 AM	Helium MFC set to  20.000000
2/14/2013	10:12:33 AM	H2 MFC set to  0.000000
2/14/2013	10:12:33 AM	BCl3 MFC set to  0.000000
2/14/2013	10:12:33 AM	PH3 MFC set to  0.000000
2/14/2013	10:12:33 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:12:33 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:12:34 AM	Tube furnace set to 0
2/14/2013	10:13:04 AM	Helium valve closed
2/14/2013	10:13:04 AM	H2 valve closed
2/14/2013	10:13:04 AM	BCl3 valve closed
2/14/2013	10:13:04 AM	PH3 valve closed
2/14/2013	10:13:04 AM	SiCl4 pre valve closed
2/14/2013	10:13:04 AM	SiCl4 post valve closed
2/14/2013	10:13:04 AM	Bypass valve closed
2/14/2013	10:13:04 AM	Bubbler valve closed
2/14/2013	10:13:04 AM	Main Vac valve opened
2/14/2013	10:13:04 AM	Helium MFC set to  0.000000
2/14/2013	10:13:04 AM	H2 MFC set to  0.000000
2/14/2013	10:13:04 AM	BCl3 MFC set to  0.000000
2/14/2013	10:13:04 AM	PH3 MFC set to  0.000000
2/14/2013	10:13:04 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:13:04 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:13:04 AM	Tube furnace set to 0
2/14/2013	10:13:34 AM	H2 valve closed
2/14/2013	10:13:34 AM	BCl3 valve closed
2/14/2013	10:13:34 AM	PH3 valve closed
2/14/2013	10:13:34 AM	SiCl4 pre valve closed
2/14/2013	10:13:34 AM	SiCl4 post valve closed
2/14/2013	10:13:34 AM	Bypass valve closed
2/14/2013	10:13:34 AM	Bubbler valve closed
2/14/2013	10:13:34 AM	Helium valve opened
2/14/2013	10:13:34 AM	Main Vac valve opened
2/14/2013	10:13:34 AM	Helium MFC set to  20.000000
2/14/2013	10:13:34 AM	H2 MFC set to  0.000000
2/14/2013	10:13:34 AM	BCl3 MFC set to  0.000000
2/14/2013	10:13:34 AM	PH3 MFC set to  0.000000
2/14/2013	10:13:34 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:13:34 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:13:34 AM	Tube furnace set to 0
2/14/2013	10:14:04 AM	Helium valve closed
2/14/2013	10:14:04 AM	H2 valve closed
2/14/2013	10:14:04 AM	BCl3 valve closed
2/14/2013	10:14:04 AM	PH3 valve closed
2/14/2013	10:14:04 AM	SiCl4 pre valve closed
2/14/2013	10:14:04 AM	SiCl4 post valve closed
2/14/2013	10:14:04 AM	Bypass valve closed
2/14/2013	10:14:04 AM	Bubbler valve closed
2/14/2013	10:14:04 AM	Main Vac valve opened
2/14/2013	10:14:04 AM	Helium MFC set to  0.000000
2/14/2013	10:14:04 AM	H2 MFC set to  0.000000
2/14/2013	10:14:04 AM	BCl3 MFC set to  0.000000
2/14/2013	10:14:04 AM	PH3 MFC set to  0.000000
2/14/2013	10:14:04 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:14:04 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:14:04 AM	Tube furnace set to 0
2/14/2013	10:14:34 AM	H2 valve closed
2/14/2013	10:14:34 AM	BCl3 valve closed
2/14/2013	10:14:34 AM	PH3 valve closed
2/14/2013	10:14:34 AM	SiCl4 pre valve closed
2/14/2013	10:14:34 AM	SiCl4 post valve closed
2/14/2013	10:14:34 AM	Bypass valve closed
2/14/2013	10:14:34 AM	Bubbler valve closed
2/14/2013	10:14:34 AM	Helium valve opened
2/14/2013	10:14:34 AM	Main Vac valve opened
2/14/2013	10:14:34 AM	Helium MFC set to  20.000000
2/14/2013	10:14:34 AM	H2 MFC set to  0.000000
2/14/2013	10:14:34 AM	BCl3 MFC set to  0.000000
2/14/2013	10:14:34 AM	PH3 MFC set to  0.000000
2/14/2013	10:14:34 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:14:34 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:14:35 AM	Tube furnace set to 0
2/14/2013	10:15:05 AM	Helium valve closed
2/14/2013	10:15:05 AM	H2 valve closed
2/14/2013	10:15:05 AM	BCl3 valve closed
2/14/2013	10:15:05 AM	PH3 valve closed
2/14/2013	10:15:05 AM	SiCl4 pre valve closed
2/14/2013	10:15:05 AM	SiCl4 post valve closed
2/14/2013	10:15:05 AM	Bypass valve closed
2/14/2013	10:15:05 AM	Bubbler valve closed
2/14/2013	10:15:05 AM	Main Vac valve opened
2/14/2013	10:15:05 AM	Helium MFC set to  0.000000
2/14/2013	10:15:05 AM	H2 MFC set to  0.000000
2/14/2013	10:15:05 AM	BCl3 MFC set to  0.000000
2/14/2013	10:15:05 AM	PH3 MFC set to  0.000000
2/14/2013	10:15:05 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:15:05 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:15:05 AM	Tube furnace set to 0
2/14/2013	10:15:35 AM	H2 valve closed
2/14/2013	10:15:35 AM	BCl3 valve closed
2/14/2013	10:15:35 AM	PH3 valve closed
2/14/2013	10:15:35 AM	SiCl4 pre valve closed
2/14/2013	10:15:35 AM	SiCl4 post valve closed
2/14/2013	10:15:35 AM	Bypass valve closed
2/14/2013	10:15:35 AM	Bubbler valve closed
2/14/2013	10:15:35 AM	Helium valve opened
2/14/2013	10:15:35 AM	Main Vac valve opened
2/14/2013	10:15:35 AM	Helium MFC set to  20.000000
2/14/2013	10:15:35 AM	H2 MFC set to  0.000000
2/14/2013	10:15:35 AM	BCl3 MFC set to  0.000000
2/14/2013	10:15:35 AM	PH3 MFC set to  0.000000
2/14/2013	10:15:35 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:15:35 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:15:35 AM	Tube furnace set to 0
2/14/2013	10:16:05 AM	Helium valve closed
2/14/2013	10:16:05 AM	H2 valve closed
2/14/2013	10:16:05 AM	BCl3 valve closed
2/14/2013	10:16:05 AM	PH3 valve closed
2/14/2013	10:16:05 AM	SiCl4 pre valve closed
2/14/2013	10:16:05 AM	SiCl4 post valve closed
2/14/2013	10:16:05 AM	Bypass valve closed
2/14/2013	10:16:05 AM	Bubbler valve closed
2/14/2013	10:16:05 AM	Main Vac valve opened
2/14/2013	10:16:05 AM	Helium MFC set to  0.000000
2/14/2013	10:16:05 AM	H2 MFC set to  0.000000
2/14/2013	10:16:05 AM	BCl3 MFC set to  0.000000
2/14/2013	10:16:05 AM	PH3 MFC set to  0.000000
2/14/2013	10:16:05 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:16:05 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:16:05 AM	Tube furnace set to 0
2/14/2013	10:16:35 AM	H2 valve closed
2/14/2013	10:16:35 AM	BCl3 valve closed
2/14/2013	10:16:35 AM	PH3 valve closed
2/14/2013	10:16:35 AM	SiCl4 pre valve closed
2/14/2013	10:16:35 AM	SiCl4 post valve closed
2/14/2013	10:16:35 AM	Bypass valve closed
2/14/2013	10:16:35 AM	Bubbler valve closed
2/14/2013	10:16:35 AM	Helium valve opened
2/14/2013	10:16:35 AM	Main Vac valve opened
2/14/2013	10:16:35 AM	Helium MFC set to  20.000000
2/14/2013	10:16:35 AM	H2 MFC set to  0.000000
2/14/2013	10:16:35 AM	BCl3 MFC set to  0.000000
2/14/2013	10:16:35 AM	PH3 MFC set to  0.000000
2/14/2013	10:16:35 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:16:35 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:16:36 AM	Tube furnace set to 0
2/14/2013	10:17:06 AM	Helium valve closed
2/14/2013	10:17:06 AM	H2 valve closed
2/14/2013	10:17:06 AM	BCl3 valve closed
2/14/2013	10:17:06 AM	PH3 valve closed
2/14/2013	10:17:06 AM	SiCl4 pre valve closed
2/14/2013	10:17:06 AM	SiCl4 post valve closed
2/14/2013	10:17:06 AM	Bypass valve closed
2/14/2013	10:17:06 AM	Bubbler valve closed
2/14/2013	10:17:06 AM	Main Vac valve opened
2/14/2013	10:17:06 AM	Helium MFC set to  0.000000
2/14/2013	10:17:06 AM	H2 MFC set to  0.000000
2/14/2013	10:17:06 AM	BCl3 MFC set to  0.000000
2/14/2013	10:17:06 AM	PH3 MFC set to  0.000000
2/14/2013	10:17:06 AM	SiCl4 MFC set to  0.000000
2/14/2013	10:17:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	10:17:06 AM	Tube furnace set to 0
2/14/2013	10:17:07 AM	Run finished at 10:17 AM
2/14/2013	10:17:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	10:25:02 AM	Tube furnace set to 150
2/14/2013	10:35:02 AM	Main Vac valve closed
2/14/2013	10:35:16 AM	Main Vac valve opened
2/14/2013	11:10:28 AM	Main Vac valve closed
2/14/2013	11:10:40 AM	Main Vac valve opened
2/14/2013	11:11:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	11:11:28 AM	Recipe started at 11:11 AM
2/14/2013	11:11:28 AM	Helium valve closed
2/14/2013	11:11:28 AM	H2 valve closed
2/14/2013	11:11:28 AM	BCl3 valve closed
2/14/2013	11:11:28 AM	PH3 valve closed
2/14/2013	11:11:28 AM	SiCl4 pre valve closed
2/14/2013	11:11:28 AM	SiCl4 post valve closed
2/14/2013	11:11:28 AM	Main Vac valve closed
2/14/2013	11:11:28 AM	Bubbler valve closed
2/14/2013	11:11:28 AM	Bypass valve opened
2/14/2013	11:11:28 AM	Helium MFC set to  0.000000
2/14/2013	11:11:28 AM	H2 MFC set to  0.000000
2/14/2013	11:11:28 AM	BCl3 MFC set to  0.000000
2/14/2013	11:11:28 AM	PH3 MFC set to  0.000000
2/14/2013	11:11:28 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:11:28 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:11:28 AM	Tube furnace set to 0
2/14/2013	11:11:29 AM	Helium valve closed
2/14/2013	11:11:29 AM	H2 valve closed
2/14/2013	11:11:29 AM	BCl3 valve closed
2/14/2013	11:11:29 AM	PH3 valve closed
2/14/2013	11:11:29 AM	SiCl4 pre valve closed
2/14/2013	11:11:29 AM	SiCl4 post valve closed
2/14/2013	11:11:29 AM	Main Vac valve closed
2/14/2013	11:11:29 AM	Bubbler valve closed
2/14/2013	11:11:29 AM	Bypass valve opened
2/14/2013	11:11:29 AM	Helium MFC set to  0.000000
2/14/2013	11:11:29 AM	H2 MFC set to  0.000000
2/14/2013	11:11:29 AM	BCl3 MFC set to  0.000000
2/14/2013	11:11:29 AM	PH3 MFC set to  0.000000
2/14/2013	11:11:29 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:11:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:11:29 AM	Tube furnace set to 0
2/14/2013	11:11:59 AM	Helium valve closed
2/14/2013	11:11:59 AM	H2 valve closed
2/14/2013	11:11:59 AM	BCl3 valve closed
2/14/2013	11:11:59 AM	PH3 valve closed
2/14/2013	11:11:59 AM	SiCl4 pre valve closed
2/14/2013	11:11:59 AM	SiCl4 post valve closed
2/14/2013	11:11:59 AM	Bypass valve closed
2/14/2013	11:11:59 AM	Bubbler valve closed
2/14/2013	11:11:59 AM	Main Vac valve opened
2/14/2013	11:11:59 AM	Helium MFC set to  0.000000
2/14/2013	11:11:59 AM	H2 MFC set to  0.000000
2/14/2013	11:11:59 AM	BCl3 MFC set to  0.000000
2/14/2013	11:11:59 AM	PH3 MFC set to  0.000000
2/14/2013	11:11:59 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:11:59 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:11:59 AM	Tube furnace set to 0
2/14/2013	11:12:29 AM	H2 valve closed
2/14/2013	11:12:29 AM	BCl3 valve closed
2/14/2013	11:12:29 AM	PH3 valve closed
2/14/2013	11:12:29 AM	SiCl4 pre valve closed
2/14/2013	11:12:29 AM	SiCl4 post valve closed
2/14/2013	11:12:29 AM	Bypass valve closed
2/14/2013	11:12:29 AM	Bubbler valve closed
2/14/2013	11:12:29 AM	Helium valve opened
2/14/2013	11:12:29 AM	Main Vac valve opened
2/14/2013	11:12:29 AM	Helium MFC set to  20.000000
2/14/2013	11:12:29 AM	H2 MFC set to  0.000000
2/14/2013	11:12:29 AM	BCl3 MFC set to  0.000000
2/14/2013	11:12:29 AM	PH3 MFC set to  0.000000
2/14/2013	11:12:29 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:12:29 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:12:29 AM	Tube furnace set to 0
2/14/2013	11:12:59 AM	Helium valve closed
2/14/2013	11:12:59 AM	H2 valve closed
2/14/2013	11:12:59 AM	BCl3 valve closed
2/14/2013	11:12:59 AM	PH3 valve closed
2/14/2013	11:12:59 AM	SiCl4 pre valve closed
2/14/2013	11:12:59 AM	SiCl4 post valve closed
2/14/2013	11:12:59 AM	Bypass valve closed
2/14/2013	11:12:59 AM	Bubbler valve closed
2/14/2013	11:12:59 AM	Main Vac valve opened
2/14/2013	11:13:00 AM	Helium MFC set to  0.000000
2/14/2013	11:13:00 AM	H2 MFC set to  0.000000
2/14/2013	11:13:00 AM	BCl3 MFC set to  0.000000
2/14/2013	11:13:00 AM	PH3 MFC set to  0.000000
2/14/2013	11:13:00 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:13:00 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:13:00 AM	Tube furnace set to 0
2/14/2013	11:13:30 AM	H2 valve closed
2/14/2013	11:13:30 AM	BCl3 valve closed
2/14/2013	11:13:30 AM	PH3 valve closed
2/14/2013	11:13:30 AM	SiCl4 pre valve closed
2/14/2013	11:13:30 AM	SiCl4 post valve closed
2/14/2013	11:13:30 AM	Bypass valve closed
2/14/2013	11:13:30 AM	Bubbler valve closed
2/14/2013	11:13:30 AM	Helium valve opened
2/14/2013	11:13:30 AM	Main Vac valve opened
2/14/2013	11:13:30 AM	Helium MFC set to  20.000000
2/14/2013	11:13:30 AM	H2 MFC set to  0.000000
2/14/2013	11:13:30 AM	BCl3 MFC set to  0.000000
2/14/2013	11:13:30 AM	PH3 MFC set to  0.000000
2/14/2013	11:13:30 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:13:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:13:30 AM	Tube furnace set to 0
2/14/2013	11:14:00 AM	Helium valve closed
2/14/2013	11:14:00 AM	H2 valve closed
2/14/2013	11:14:00 AM	BCl3 valve closed
2/14/2013	11:14:00 AM	PH3 valve closed
2/14/2013	11:14:00 AM	SiCl4 pre valve closed
2/14/2013	11:14:00 AM	SiCl4 post valve closed
2/14/2013	11:14:00 AM	Bypass valve closed
2/14/2013	11:14:00 AM	Bubbler valve closed
2/14/2013	11:14:00 AM	Main Vac valve opened
2/14/2013	11:14:00 AM	Helium MFC set to  0.000000
2/14/2013	11:14:00 AM	H2 MFC set to  0.000000
2/14/2013	11:14:00 AM	BCl3 MFC set to  0.000000
2/14/2013	11:14:00 AM	PH3 MFC set to  0.000000
2/14/2013	11:14:00 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:14:00 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:14:00 AM	Tube furnace set to 0
2/14/2013	11:14:30 AM	H2 valve closed
2/14/2013	11:14:30 AM	BCl3 valve closed
2/14/2013	11:14:30 AM	PH3 valve closed
2/14/2013	11:14:30 AM	SiCl4 pre valve closed
2/14/2013	11:14:30 AM	SiCl4 post valve closed
2/14/2013	11:14:30 AM	Bypass valve closed
2/14/2013	11:14:30 AM	Bubbler valve closed
2/14/2013	11:14:30 AM	Helium valve opened
2/14/2013	11:14:30 AM	Main Vac valve opened
2/14/2013	11:14:30 AM	Helium MFC set to  20.000000
2/14/2013	11:14:30 AM	H2 MFC set to  0.000000
2/14/2013	11:14:30 AM	BCl3 MFC set to  0.000000
2/14/2013	11:14:30 AM	PH3 MFC set to  0.000000
2/14/2013	11:14:30 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:14:30 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:14:30 AM	Tube furnace set to 0
2/14/2013	11:15:00 AM	Helium valve closed
2/14/2013	11:15:00 AM	H2 valve closed
2/14/2013	11:15:00 AM	BCl3 valve closed
2/14/2013	11:15:00 AM	PH3 valve closed
2/14/2013	11:15:00 AM	SiCl4 pre valve closed
2/14/2013	11:15:00 AM	SiCl4 post valve closed
2/14/2013	11:15:01 AM	Bypass valve closed
2/14/2013	11:15:01 AM	Bubbler valve closed
2/14/2013	11:15:01 AM	Main Vac valve opened
2/14/2013	11:15:01 AM	Helium MFC set to  0.000000
2/14/2013	11:15:01 AM	H2 MFC set to  0.000000
2/14/2013	11:15:01 AM	BCl3 MFC set to  0.000000
2/14/2013	11:15:01 AM	PH3 MFC set to  0.000000
2/14/2013	11:15:01 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:15:01 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:15:01 AM	Tube furnace set to 0
2/14/2013	11:15:31 AM	H2 valve closed
2/14/2013	11:15:31 AM	BCl3 valve closed
2/14/2013	11:15:31 AM	PH3 valve closed
2/14/2013	11:15:31 AM	SiCl4 pre valve closed
2/14/2013	11:15:31 AM	SiCl4 post valve closed
2/14/2013	11:15:31 AM	Bypass valve closed
2/14/2013	11:15:31 AM	Bubbler valve closed
2/14/2013	11:15:31 AM	Helium valve opened
2/14/2013	11:15:31 AM	Main Vac valve opened
2/14/2013	11:15:31 AM	Helium MFC set to  20.000000
2/14/2013	11:15:31 AM	H2 MFC set to  0.000000
2/14/2013	11:15:31 AM	BCl3 MFC set to  0.000000
2/14/2013	11:15:31 AM	PH3 MFC set to  0.000000
2/14/2013	11:15:31 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:15:31 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:15:31 AM	Tube furnace set to 0
2/14/2013	11:16:01 AM	Helium valve closed
2/14/2013	11:16:01 AM	H2 valve closed
2/14/2013	11:16:01 AM	BCl3 valve closed
2/14/2013	11:16:01 AM	PH3 valve closed
2/14/2013	11:16:01 AM	SiCl4 pre valve closed
2/14/2013	11:16:01 AM	SiCl4 post valve closed
2/14/2013	11:16:01 AM	Bypass valve closed
2/14/2013	11:16:01 AM	Bubbler valve closed
2/14/2013	11:16:01 AM	Main Vac valve opened
2/14/2013	11:16:01 AM	Helium MFC set to  0.000000
2/14/2013	11:16:01 AM	H2 MFC set to  0.000000
2/14/2013	11:16:01 AM	BCl3 MFC set to  0.000000
2/14/2013	11:16:01 AM	PH3 MFC set to  0.000000
2/14/2013	11:16:01 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:16:01 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:16:01 AM	Tube furnace set to 0
2/14/2013	11:16:31 AM	H2 valve closed
2/14/2013	11:16:31 AM	BCl3 valve closed
2/14/2013	11:16:31 AM	PH3 valve closed
2/14/2013	11:16:31 AM	SiCl4 pre valve closed
2/14/2013	11:16:31 AM	SiCl4 post valve closed
2/14/2013	11:16:31 AM	Bypass valve closed
2/14/2013	11:16:31 AM	Bubbler valve closed
2/14/2013	11:16:31 AM	Helium valve opened
2/14/2013	11:16:31 AM	Main Vac valve opened
2/14/2013	11:16:31 AM	Helium MFC set to  20.000000
2/14/2013	11:16:31 AM	H2 MFC set to  0.000000
2/14/2013	11:16:31 AM	BCl3 MFC set to  0.000000
2/14/2013	11:16:31 AM	PH3 MFC set to  0.000000
2/14/2013	11:16:31 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:16:31 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:16:31 AM	Tube furnace set to 0
2/14/2013	11:17:01 AM	Helium valve closed
2/14/2013	11:17:01 AM	H2 valve closed
2/14/2013	11:17:01 AM	BCl3 valve closed
2/14/2013	11:17:01 AM	PH3 valve closed
2/14/2013	11:17:01 AM	SiCl4 pre valve closed
2/14/2013	11:17:02 AM	SiCl4 post valve closed
2/14/2013	11:17:02 AM	Bypass valve closed
2/14/2013	11:17:02 AM	Bubbler valve closed
2/14/2013	11:17:02 AM	Main Vac valve opened
2/14/2013	11:17:02 AM	Helium MFC set to  0.000000
2/14/2013	11:17:02 AM	H2 MFC set to  0.000000
2/14/2013	11:17:02 AM	BCl3 MFC set to  0.000000
2/14/2013	11:17:02 AM	PH3 MFC set to  0.000000
2/14/2013	11:17:02 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:17:02 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:17:02 AM	Tube furnace set to 0
2/14/2013	11:17:32 AM	H2 valve closed
2/14/2013	11:17:32 AM	BCl3 valve closed
2/14/2013	11:17:32 AM	PH3 valve closed
2/14/2013	11:17:32 AM	SiCl4 pre valve closed
2/14/2013	11:17:32 AM	SiCl4 post valve closed
2/14/2013	11:17:32 AM	Bypass valve closed
2/14/2013	11:17:32 AM	Bubbler valve closed
2/14/2013	11:17:32 AM	Helium valve opened
2/14/2013	11:17:32 AM	Main Vac valve opened
2/14/2013	11:17:32 AM	Helium MFC set to  20.000000
2/14/2013	11:17:32 AM	H2 MFC set to  0.000000
2/14/2013	11:17:32 AM	BCl3 MFC set to  0.000000
2/14/2013	11:17:32 AM	PH3 MFC set to  0.000000
2/14/2013	11:17:32 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:17:32 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:17:32 AM	Tube furnace set to 0
2/14/2013	11:18:02 AM	Helium valve closed
2/14/2013	11:18:02 AM	H2 valve closed
2/14/2013	11:18:02 AM	BCl3 valve closed
2/14/2013	11:18:02 AM	PH3 valve closed
2/14/2013	11:18:02 AM	SiCl4 pre valve closed
2/14/2013	11:18:02 AM	SiCl4 post valve closed
2/14/2013	11:18:02 AM	Bypass valve closed
2/14/2013	11:18:02 AM	Bubbler valve closed
2/14/2013	11:18:02 AM	Main Vac valve opened
2/14/2013	11:18:02 AM	Helium MFC set to  0.000000
2/14/2013	11:18:02 AM	H2 MFC set to  0.000000
2/14/2013	11:18:02 AM	BCl3 MFC set to  0.000000
2/14/2013	11:18:02 AM	PH3 MFC set to  0.000000
2/14/2013	11:18:02 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:18:02 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:18:02 AM	Tube furnace set to 0
2/14/2013	11:18:32 AM	H2 valve closed
2/14/2013	11:18:32 AM	BCl3 valve closed
2/14/2013	11:18:32 AM	PH3 valve closed
2/14/2013	11:18:32 AM	SiCl4 pre valve closed
2/14/2013	11:18:32 AM	SiCl4 post valve closed
2/14/2013	11:18:32 AM	Bypass valve closed
2/14/2013	11:18:32 AM	Bubbler valve closed
2/14/2013	11:18:32 AM	Helium valve opened
2/14/2013	11:18:32 AM	Main Vac valve opened
2/14/2013	11:18:32 AM	Helium MFC set to  20.000000
2/14/2013	11:18:32 AM	H2 MFC set to  0.000000
2/14/2013	11:18:32 AM	BCl3 MFC set to  0.000000
2/14/2013	11:18:32 AM	PH3 MFC set to  0.000000
2/14/2013	11:18:32 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:18:32 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:18:32 AM	Tube furnace set to 0
2/14/2013	11:19:02 AM	Helium valve closed
2/14/2013	11:19:02 AM	H2 valve closed
2/14/2013	11:19:02 AM	BCl3 valve closed
2/14/2013	11:19:02 AM	PH3 valve closed
2/14/2013	11:19:02 AM	SiCl4 pre valve closed
2/14/2013	11:19:02 AM	SiCl4 post valve closed
2/14/2013	11:19:02 AM	Bypass valve closed
2/14/2013	11:19:02 AM	Bubbler valve closed
2/14/2013	11:19:02 AM	Main Vac valve opened
2/14/2013	11:19:03 AM	Helium MFC set to  0.000000
2/14/2013	11:19:03 AM	H2 MFC set to  0.000000
2/14/2013	11:19:03 AM	BCl3 MFC set to  0.000000
2/14/2013	11:19:03 AM	PH3 MFC set to  0.000000
2/14/2013	11:19:03 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:19:03 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:19:03 AM	Tube furnace set to 0
2/14/2013	11:19:33 AM	H2 valve closed
2/14/2013	11:19:33 AM	BCl3 valve closed
2/14/2013	11:19:33 AM	PH3 valve closed
2/14/2013	11:19:33 AM	SiCl4 pre valve closed
2/14/2013	11:19:33 AM	SiCl4 post valve closed
2/14/2013	11:19:33 AM	Bypass valve closed
2/14/2013	11:19:33 AM	Bubbler valve closed
2/14/2013	11:19:33 AM	Helium valve opened
2/14/2013	11:19:33 AM	Main Vac valve opened
2/14/2013	11:19:33 AM	Helium MFC set to  20.000000
2/14/2013	11:19:33 AM	H2 MFC set to  0.000000
2/14/2013	11:19:33 AM	BCl3 MFC set to  0.000000
2/14/2013	11:19:33 AM	PH3 MFC set to  0.000000
2/14/2013	11:19:33 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:19:33 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:19:33 AM	Tube furnace set to 0
2/14/2013	11:20:03 AM	Helium valve closed
2/14/2013	11:20:03 AM	H2 valve closed
2/14/2013	11:20:03 AM	BCl3 valve closed
2/14/2013	11:20:03 AM	PH3 valve closed
2/14/2013	11:20:03 AM	SiCl4 pre valve closed
2/14/2013	11:20:03 AM	SiCl4 post valve closed
2/14/2013	11:20:03 AM	Bypass valve closed
2/14/2013	11:20:03 AM	Bubbler valve closed
2/14/2013	11:20:03 AM	Main Vac valve opened
2/14/2013	11:20:03 AM	Helium MFC set to  0.000000
2/14/2013	11:20:03 AM	H2 MFC set to  0.000000
2/14/2013	11:20:03 AM	BCl3 MFC set to  0.000000
2/14/2013	11:20:03 AM	PH3 MFC set to  0.000000
2/14/2013	11:20:03 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:20:03 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:20:03 AM	Tube furnace set to 0
2/14/2013	11:20:33 AM	H2 valve closed
2/14/2013	11:20:33 AM	BCl3 valve closed
2/14/2013	11:20:33 AM	PH3 valve closed
2/14/2013	11:20:33 AM	SiCl4 pre valve closed
2/14/2013	11:20:33 AM	SiCl4 post valve closed
2/14/2013	11:20:33 AM	Bypass valve closed
2/14/2013	11:20:33 AM	Bubbler valve closed
2/14/2013	11:20:33 AM	Helium valve opened
2/14/2013	11:20:33 AM	Main Vac valve opened
2/14/2013	11:20:33 AM	Helium MFC set to  20.000000
2/14/2013	11:20:33 AM	H2 MFC set to  0.000000
2/14/2013	11:20:33 AM	BCl3 MFC set to  0.000000
2/14/2013	11:20:33 AM	PH3 MFC set to  0.000000
2/14/2013	11:20:33 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:20:33 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:20:33 AM	Tube furnace set to 0
2/14/2013	11:21:03 AM	Helium valve closed
2/14/2013	11:21:03 AM	H2 valve closed
2/14/2013	11:21:03 AM	BCl3 valve closed
2/14/2013	11:21:03 AM	PH3 valve closed
2/14/2013	11:21:03 AM	SiCl4 pre valve closed
2/14/2013	11:21:03 AM	SiCl4 post valve closed
2/14/2013	11:21:03 AM	Bypass valve closed
2/14/2013	11:21:03 AM	Bubbler valve closed
2/14/2013	11:21:04 AM	Main Vac valve opened
2/14/2013	11:21:04 AM	Helium MFC set to  0.000000
2/14/2013	11:21:04 AM	H2 MFC set to  0.000000
2/14/2013	11:21:04 AM	BCl3 MFC set to  0.000000
2/14/2013	11:21:04 AM	PH3 MFC set to  0.000000
2/14/2013	11:21:04 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:21:04 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:21:04 AM	Tube furnace set to 0
2/14/2013	11:21:34 AM	H2 valve closed
2/14/2013	11:21:34 AM	BCl3 valve closed
2/14/2013	11:21:34 AM	PH3 valve closed
2/14/2013	11:21:34 AM	SiCl4 pre valve closed
2/14/2013	11:21:34 AM	SiCl4 post valve closed
2/14/2013	11:21:34 AM	Bypass valve closed
2/14/2013	11:21:34 AM	Bubbler valve closed
2/14/2013	11:21:34 AM	Helium valve opened
2/14/2013	11:21:34 AM	Main Vac valve opened
2/14/2013	11:21:34 AM	Helium MFC set to  20.000000
2/14/2013	11:21:34 AM	H2 MFC set to  0.000000
2/14/2013	11:21:34 AM	BCl3 MFC set to  0.000000
2/14/2013	11:21:34 AM	PH3 MFC set to  0.000000
2/14/2013	11:21:34 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:21:34 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:21:34 AM	Tube furnace set to 0
2/14/2013	11:22:04 AM	Helium valve closed
2/14/2013	11:22:04 AM	H2 valve closed
2/14/2013	11:22:04 AM	BCl3 valve closed
2/14/2013	11:22:04 AM	PH3 valve closed
2/14/2013	11:22:04 AM	SiCl4 pre valve closed
2/14/2013	11:22:04 AM	SiCl4 post valve closed
2/14/2013	11:22:04 AM	Bypass valve closed
2/14/2013	11:22:04 AM	Bubbler valve closed
2/14/2013	11:22:04 AM	Main Vac valve opened
2/14/2013	11:22:04 AM	Helium MFC set to  0.000000
2/14/2013	11:22:04 AM	H2 MFC set to  0.000000
2/14/2013	11:22:04 AM	BCl3 MFC set to  0.000000
2/14/2013	11:22:04 AM	PH3 MFC set to  0.000000
2/14/2013	11:22:04 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:22:04 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:22:04 AM	Tube furnace set to 0
2/14/2013	11:22:05 AM	Run finished at 11:22 AM
2/14/2013	11:22:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	11:27:59 AM	Main Vac valve closed
2/14/2013	11:28:11 AM	Main Vac valve opened
2/14/2013	11:35:49 AM	Recipe started at 11:35 AM
2/14/2013	11:35:49 AM	Helium valve closed
2/14/2013	11:35:49 AM	H2 valve closed
2/14/2013	11:35:49 AM	BCl3 valve closed
2/14/2013	11:35:49 AM	PH3 valve closed
2/14/2013	11:35:49 AM	SiCl4 pre valve closed
2/14/2013	11:35:49 AM	SiCl4 post valve closed
2/14/2013	11:35:49 AM	Main Vac valve closed
2/14/2013	11:35:49 AM	Bypass valve closed
2/14/2013	11:35:49 AM	Bubbler valve closed
2/14/2013	11:35:49 AM	Helium MFC set to  0.000000
2/14/2013	11:35:49 AM	H2 MFC set to  0.000000
2/14/2013	11:35:49 AM	BCl3 MFC set to  0.000000
2/14/2013	11:35:49 AM	PH3 MFC set to  0.000000
2/14/2013	11:35:49 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:35:49 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:35:49 AM	Tube furnace set to 0
2/14/2013	11:35:52 AM	Helium valve closed
2/14/2013	11:35:52 AM	BCl3 valve closed
2/14/2013	11:35:52 AM	PH3 valve closed
2/14/2013	11:35:52 AM	SiCl4 pre valve closed
2/14/2013	11:35:52 AM	SiCl4 post valve closed
2/14/2013	11:35:52 AM	Main Vac valve closed
2/14/2013	11:35:52 AM	Bypass valve closed
2/14/2013	11:35:52 AM	Bubbler valve closed
2/14/2013	11:35:52 AM	H2 valve opened
2/14/2013	11:35:52 AM	Helium MFC set to  0.000000
2/14/2013	11:35:52 AM	H2 MFC set to  500.000000
2/14/2013	11:35:52 AM	BCl3 MFC set to  0.000000
2/14/2013	11:35:52 AM	PH3 MFC set to  0.000000
2/14/2013	11:35:52 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:35:52 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:35:52 AM	Tube furnace set to 0
2/14/2013	11:37:05 AM	Helium valve closed
2/14/2013	11:37:05 AM	BCl3 valve closed
2/14/2013	11:37:05 AM	PH3 valve closed
2/14/2013	11:37:05 AM	SiCl4 pre valve closed
2/14/2013	11:37:05 AM	SiCl4 post valve closed
2/14/2013	11:37:05 AM	Main Vac valve closed
2/14/2013	11:37:05 AM	Bypass valve closed
2/14/2013	11:37:05 AM	H2 valve opened
2/14/2013	11:37:05 AM	Bubbler valve opened
2/14/2013	11:37:05 AM	Helium MFC set to  0.000000
2/14/2013	11:37:05 AM	H2 MFC set to  500.000000
2/14/2013	11:37:05 AM	BCl3 MFC set to  0.000000
2/14/2013	11:37:05 AM	PH3 MFC set to  0.000000
2/14/2013	11:37:05 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:37:05 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:37:05 AM	Tube furnace set to 0
2/14/2013	11:37:06 AM	Helium valve closed
2/14/2013	11:37:06 AM	BCl3 valve closed
2/14/2013	11:37:06 AM	PH3 valve closed
2/14/2013	11:37:06 AM	SiCl4 pre valve closed
2/14/2013	11:37:06 AM	SiCl4 post valve closed
2/14/2013	11:37:06 AM	Main Vac valve closed
2/14/2013	11:37:06 AM	Bypass valve closed
2/14/2013	11:37:06 AM	H2 valve opened
2/14/2013	11:37:06 AM	Bubbler valve opened
2/14/2013	11:37:06 AM	Helium MFC set to  0.000000
2/14/2013	11:37:06 AM	H2 MFC set to  500.000000
2/14/2013	11:37:06 AM	BCl3 MFC set to  0.000000
2/14/2013	11:37:06 AM	PH3 MFC set to  0.000000
2/14/2013	11:37:06 AM	SiCl4 MFC set to  0.000000
2/14/2013	11:37:06 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:37:06 AM	Tube furnace set to 1000
2/14/2013	11:57:06 AM	Helium valve closed
2/14/2013	11:57:06 AM	BCl3 valve closed
2/14/2013	11:57:06 AM	Main Vac valve closed
2/14/2013	11:57:06 AM	Bypass valve closed
2/14/2013	11:57:06 AM	H2 valve opened
2/14/2013	11:57:06 AM	PH3 valve opened
2/14/2013	11:57:06 AM	SiCl4 pre valve opened
2/14/2013	11:57:06 AM	SiCl4 post valve opened
2/14/2013	11:57:06 AM	Bubbler valve opened
2/14/2013	11:57:07 AM	Helium MFC set to  0.000000
2/14/2013	11:57:07 AM	H2 MFC set to  450.000000
2/14/2013	11:57:07 AM	BCl3 MFC set to  0.000000
2/14/2013	11:57:07 AM	PH3 MFC set to  20.000000
2/14/2013	11:57:07 AM	SiCl4 MFC set to  50.000000
2/14/2013	11:57:07 AM	Bypass solenoid MFC set to  0.000000
2/14/2013	11:57:07 AM	Tube furnace set to 1000
2/14/2013	12:09:07 PM	Helium valve closed
2/14/2013	12:09:07 PM	BCl3 valve closed
2/14/2013	12:09:07 PM	PH3 valve closed
2/14/2013	12:09:07 PM	SiCl4 pre valve closed
2/14/2013	12:09:07 PM	SiCl4 post valve closed
2/14/2013	12:09:07 PM	Main Vac valve closed
2/14/2013	12:09:07 PM	Bypass valve closed
2/14/2013	12:09:07 PM	H2 valve opened
2/14/2013	12:09:07 PM	Bubbler valve opened
2/14/2013	12:09:07 PM	Helium MFC set to  0.000000
2/14/2013	12:09:07 PM	H2 MFC set to  500.000000
2/14/2013	12:09:07 PM	BCl3 MFC set to  0.000000
2/14/2013	12:09:07 PM	PH3 MFC set to  0.000000
2/14/2013	12:09:07 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:09:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:09:07 PM	Tube furnace set to 900
2/14/2013	12:14:07 PM	Helium valve closed
2/14/2013	12:14:07 PM	BCl3 valve closed
2/14/2013	12:14:07 PM	PH3 valve closed
2/14/2013	12:14:07 PM	SiCl4 pre valve closed
2/14/2013	12:14:07 PM	SiCl4 post valve closed
2/14/2013	12:14:07 PM	Main Vac valve closed
2/14/2013	12:14:07 PM	Bypass valve closed
2/14/2013	12:14:07 PM	H2 valve opened
2/14/2013	12:14:07 PM	Bubbler valve opened
2/14/2013	12:14:07 PM	Helium MFC set to  0.000000
2/14/2013	12:14:07 PM	H2 MFC set to  500.000000
2/14/2013	12:14:07 PM	BCl3 MFC set to  0.000000
2/14/2013	12:14:07 PM	PH3 MFC set to  0.000000
2/14/2013	12:14:07 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:14:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:14:07 PM	Tube furnace set to 800
2/14/2013	12:19:07 PM	Helium valve closed
2/14/2013	12:19:07 PM	BCl3 valve closed
2/14/2013	12:19:07 PM	PH3 valve closed
2/14/2013	12:19:07 PM	SiCl4 pre valve closed
2/14/2013	12:19:07 PM	SiCl4 post valve closed
2/14/2013	12:19:07 PM	Main Vac valve closed
2/14/2013	12:19:07 PM	Bypass valve closed
2/14/2013	12:19:07 PM	H2 valve opened
2/14/2013	12:19:07 PM	Bubbler valve opened
2/14/2013	12:19:07 PM	Helium MFC set to  0.000000
2/14/2013	12:19:07 PM	H2 MFC set to  500.000000
2/14/2013	12:19:07 PM	BCl3 MFC set to  0.000000
2/14/2013	12:19:07 PM	PH3 MFC set to  0.000000
2/14/2013	12:19:07 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:19:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:19:07 PM	Tube furnace set to 700
2/14/2013	12:24:07 PM	Helium valve closed
2/14/2013	12:24:07 PM	BCl3 valve closed
2/14/2013	12:24:07 PM	PH3 valve closed
2/14/2013	12:24:07 PM	SiCl4 pre valve closed
2/14/2013	12:24:07 PM	SiCl4 post valve closed
2/14/2013	12:24:07 PM	Main Vac valve closed
2/14/2013	12:24:07 PM	Bypass valve closed
2/14/2013	12:24:07 PM	H2 valve opened
2/14/2013	12:24:07 PM	Bubbler valve opened
2/14/2013	12:24:07 PM	Helium MFC set to  0.000000
2/14/2013	12:24:07 PM	H2 MFC set to  500.000000
2/14/2013	12:24:07 PM	BCl3 MFC set to  0.000000
2/14/2013	12:24:07 PM	PH3 MFC set to  0.000000
2/14/2013	12:24:07 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:24:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:24:08 PM	Tube furnace set to 600
2/14/2013	12:29:08 PM	H2 valve closed
2/14/2013	12:29:08 PM	BCl3 valve closed
2/14/2013	12:29:08 PM	PH3 valve closed
2/14/2013	12:29:08 PM	SiCl4 pre valve closed
2/14/2013	12:29:08 PM	SiCl4 post valve closed
2/14/2013	12:29:08 PM	Main Vac valve closed
2/14/2013	12:29:08 PM	Bypass valve closed
2/14/2013	12:29:08 PM	Helium valve opened
2/14/2013	12:29:08 PM	Bubbler valve opened
2/14/2013	12:29:08 PM	Helium MFC set to  500.000000
2/14/2013	12:29:08 PM	H2 MFC set to  0.000000
2/14/2013	12:29:08 PM	BCl3 MFC set to  0.000000
2/14/2013	12:29:08 PM	PH3 MFC set to  0.000000
2/14/2013	12:29:08 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:29:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:29:08 PM	Tube furnace set to 0
2/14/2013	12:34:50 PM	Run aborted at 12:34 PM
2/14/2013	12:34:50 PM	Helium valve closed
2/14/2013	12:34:50 PM	H2 valve closed
2/14/2013	12:34:50 PM	BCl3 valve closed
2/14/2013	12:34:50 PM	PH3 valve closed
2/14/2013	12:34:50 PM	SiCl4 pre valve closed
2/14/2013	12:34:50 PM	SiCl4 post valve closed
2/14/2013	12:34:50 PM	Bypass valve closed
2/14/2013	12:34:50 PM	Main Vac valve closed
2/14/2013	12:34:50 PM	Bubbler valve closed
2/14/2013	12:34:50 PM	Helium MFC set to  0.000000
2/14/2013	12:34:50 PM	H2 MFC set to  0.000000
2/14/2013	12:34:50 PM	BCl3 MFC set to  0.000000
2/14/2013	12:34:50 PM	PH3 MFC set to  0.000000
2/14/2013	12:34:50 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:34:50 PM	Tube furnace set to 0
2/14/2013	12:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	12:34:55 PM	Recipe started at 12:34 PM
2/14/2013	12:34:55 PM	Helium valve closed
2/14/2013	12:34:55 PM	H2 valve closed
2/14/2013	12:34:55 PM	BCl3 valve closed
2/14/2013	12:34:55 PM	PH3 valve closed
2/14/2013	12:34:55 PM	SiCl4 pre valve closed
2/14/2013	12:34:55 PM	SiCl4 post valve closed
2/14/2013	12:34:55 PM	Main Vac valve closed
2/14/2013	12:34:55 PM	Bypass valve closed
2/14/2013	12:34:55 PM	Bubbler valve closed
2/14/2013	12:34:55 PM	Helium MFC set to  0.000000
2/14/2013	12:34:55 PM	H2 MFC set to  0.000000
2/14/2013	12:34:55 PM	BCl3 MFC set to  0.000000
2/14/2013	12:34:55 PM	PH3 MFC set to  0.000000
2/14/2013	12:34:55 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:34:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:34:55 PM	Tube furnace set to 0
2/14/2013	12:34:58 PM	H2 valve closed
2/14/2013	12:34:58 PM	BCl3 valve closed
2/14/2013	12:34:58 PM	PH3 valve closed
2/14/2013	12:34:58 PM	SiCl4 pre valve closed
2/14/2013	12:34:58 PM	SiCl4 post valve closed
2/14/2013	12:34:58 PM	Main Vac valve closed
2/14/2013	12:34:58 PM	Bypass valve closed
2/14/2013	12:34:58 PM	Bubbler valve closed
2/14/2013	12:34:58 PM	Helium valve opened
2/14/2013	12:34:58 PM	Helium MFC set to  500.000000
2/14/2013	12:34:58 PM	H2 MFC set to  0.000000
2/14/2013	12:34:58 PM	BCl3 MFC set to  0.000000
2/14/2013	12:34:59 PM	PH3 MFC set to  0.000000
2/14/2013	12:34:59 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:34:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:34:59 PM	Tube furnace set to 0
2/14/2013	12:34:59 PM	Helium valve closed
2/14/2013	12:34:59 PM	H2 valve closed
2/14/2013	12:34:59 PM	BCl3 valve closed
2/14/2013	12:34:59 PM	PH3 valve closed
2/14/2013	12:34:59 PM	SiCl4 pre valve closed
2/14/2013	12:34:59 PM	SiCl4 post valve closed
2/14/2013	12:34:59 PM	Main Vac valve closed
2/14/2013	12:34:59 PM	Bypass valve closed
2/14/2013	12:34:59 PM	Bubbler valve closed
2/14/2013	12:34:59 PM	Helium MFC set to  0.000000
2/14/2013	12:34:59 PM	H2 MFC set to  0.000000
2/14/2013	12:34:59 PM	BCl3 MFC set to  0.000000
2/14/2013	12:34:59 PM	PH3 MFC set to  0.000000
2/14/2013	12:34:59 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:34:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:34:59 PM	Tube furnace set to 0
2/14/2013	12:35:00 PM	Run finished at 12:35 PM
2/14/2013	12:35:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	12:39:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	12:39:40 PM	Recipe started at 12:39 PM
2/14/2013	12:39:40 PM	Helium valve closed
2/14/2013	12:39:40 PM	H2 valve closed
2/14/2013	12:39:40 PM	BCl3 valve closed
2/14/2013	12:39:40 PM	PH3 valve closed
2/14/2013	12:39:40 PM	SiCl4 pre valve closed
2/14/2013	12:39:40 PM	SiCl4 post valve closed
2/14/2013	12:39:40 PM	Main Vac valve closed
2/14/2013	12:39:40 PM	Bubbler valve closed
2/14/2013	12:39:40 PM	Bypass valve opened
2/14/2013	12:39:40 PM	Helium MFC set to  0.000000
2/14/2013	12:39:40 PM	H2 MFC set to  0.000000
2/14/2013	12:39:40 PM	BCl3 MFC set to  0.000000
2/14/2013	12:39:40 PM	PH3 MFC set to  0.000000
2/14/2013	12:39:40 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:39:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:39:40 PM	Tube furnace set to 0
2/14/2013	12:40:49 PM	Helium valve closed
2/14/2013	12:40:49 PM	H2 valve closed
2/14/2013	12:40:49 PM	BCl3 valve closed
2/14/2013	12:40:49 PM	PH3 valve closed
2/14/2013	12:40:49 PM	SiCl4 pre valve closed
2/14/2013	12:40:49 PM	SiCl4 post valve closed
2/14/2013	12:40:49 PM	Main Vac valve closed
2/14/2013	12:40:49 PM	Bubbler valve closed
2/14/2013	12:40:49 PM	Bypass valve opened
2/14/2013	12:40:49 PM	Helium MFC set to  0.000000
2/14/2013	12:40:49 PM	H2 MFC set to  0.000000
2/14/2013	12:40:49 PM	BCl3 MFC set to  0.000000
2/14/2013	12:40:49 PM	PH3 MFC set to  0.000000
2/14/2013	12:40:49 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:40:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:40:50 PM	Tube furnace set to 0
2/14/2013	12:41:50 PM	Helium valve closed
2/14/2013	12:41:50 PM	H2 valve closed
2/14/2013	12:41:50 PM	BCl3 valve closed
2/14/2013	12:41:50 PM	PH3 valve closed
2/14/2013	12:41:50 PM	SiCl4 pre valve closed
2/14/2013	12:41:50 PM	SiCl4 post valve closed
2/14/2013	12:41:50 PM	Bypass valve closed
2/14/2013	12:41:50 PM	Bubbler valve closed
2/14/2013	12:41:50 PM	Main Vac valve opened
2/14/2013	12:41:50 PM	Helium MFC set to  0.000000
2/14/2013	12:41:50 PM	H2 MFC set to  0.000000
2/14/2013	12:41:50 PM	BCl3 MFC set to  0.000000
2/14/2013	12:41:50 PM	PH3 MFC set to  0.000000
2/14/2013	12:41:50 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:41:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:41:50 PM	Tube furnace set to 0
2/14/2013	12:41:51 PM	Run finished at 12:41 PM
2/14/2013	12:41:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	12:56:08 PM	Main Vac valve closed
2/14/2013	12:56:19 PM	Main Vac valve opened
2/14/2013	12:56:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	12:56:44 PM	Recipe started at 12:56 PM
2/14/2013	12:56:44 PM	Helium valve closed
2/14/2013	12:56:44 PM	H2 valve closed
2/14/2013	12:56:44 PM	BCl3 valve closed
2/14/2013	12:56:44 PM	PH3 valve closed
2/14/2013	12:56:44 PM	SiCl4 pre valve closed
2/14/2013	12:56:44 PM	SiCl4 post valve closed
2/14/2013	12:56:44 PM	Main Vac valve closed
2/14/2013	12:56:44 PM	Bubbler valve closed
2/14/2013	12:56:44 PM	Bypass valve opened
2/14/2013	12:56:44 PM	Helium MFC set to  0.000000
2/14/2013	12:56:44 PM	H2 MFC set to  0.000000
2/14/2013	12:56:44 PM	BCl3 MFC set to  0.000000
2/14/2013	12:56:44 PM	PH3 MFC set to  0.000000
2/14/2013	12:56:44 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:56:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:56:45 PM	Tube furnace set to 0
2/14/2013	12:56:45 PM	Helium valve closed
2/14/2013	12:56:45 PM	H2 valve closed
2/14/2013	12:56:45 PM	BCl3 valve closed
2/14/2013	12:56:45 PM	PH3 valve closed
2/14/2013	12:56:45 PM	SiCl4 pre valve closed
2/14/2013	12:56:45 PM	SiCl4 post valve closed
2/14/2013	12:56:45 PM	Main Vac valve closed
2/14/2013	12:56:45 PM	Bubbler valve closed
2/14/2013	12:56:45 PM	Bypass valve opened
2/14/2013	12:56:45 PM	Helium MFC set to  0.000000
2/14/2013	12:56:45 PM	H2 MFC set to  0.000000
2/14/2013	12:56:45 PM	BCl3 MFC set to  0.000000
2/14/2013	12:56:45 PM	PH3 MFC set to  0.000000
2/14/2013	12:56:45 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:56:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:56:45 PM	Tube furnace set to 0
2/14/2013	12:57:15 PM	Helium valve closed
2/14/2013	12:57:15 PM	H2 valve closed
2/14/2013	12:57:15 PM	BCl3 valve closed
2/14/2013	12:57:15 PM	PH3 valve closed
2/14/2013	12:57:15 PM	SiCl4 pre valve closed
2/14/2013	12:57:15 PM	SiCl4 post valve closed
2/14/2013	12:57:15 PM	Bypass valve closed
2/14/2013	12:57:15 PM	Bubbler valve closed
2/14/2013	12:57:15 PM	Main Vac valve opened
2/14/2013	12:57:15 PM	Helium MFC set to  0.000000
2/14/2013	12:57:15 PM	H2 MFC set to  0.000000
2/14/2013	12:57:15 PM	BCl3 MFC set to  0.000000
2/14/2013	12:57:15 PM	PH3 MFC set to  0.000000
2/14/2013	12:57:15 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:57:15 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:57:15 PM	Tube furnace set to 0
2/14/2013	12:57:45 PM	H2 valve closed
2/14/2013	12:57:45 PM	BCl3 valve closed
2/14/2013	12:57:45 PM	PH3 valve closed
2/14/2013	12:57:45 PM	SiCl4 pre valve closed
2/14/2013	12:57:45 PM	SiCl4 post valve closed
2/14/2013	12:57:45 PM	Bypass valve closed
2/14/2013	12:57:45 PM	Bubbler valve closed
2/14/2013	12:57:45 PM	Helium valve opened
2/14/2013	12:57:45 PM	Main Vac valve opened
2/14/2013	12:57:45 PM	Helium MFC set to  20.000000
2/14/2013	12:57:45 PM	H2 MFC set to  0.000000
2/14/2013	12:57:45 PM	BCl3 MFC set to  0.000000
2/14/2013	12:57:45 PM	PH3 MFC set to  0.000000
2/14/2013	12:57:45 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:57:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:57:46 PM	Tube furnace set to 0
2/14/2013	12:58:16 PM	Helium valve closed
2/14/2013	12:58:16 PM	H2 valve closed
2/14/2013	12:58:16 PM	BCl3 valve closed
2/14/2013	12:58:16 PM	PH3 valve closed
2/14/2013	12:58:16 PM	SiCl4 pre valve closed
2/14/2013	12:58:16 PM	SiCl4 post valve closed
2/14/2013	12:58:16 PM	Bypass valve closed
2/14/2013	12:58:16 PM	Bubbler valve closed
2/14/2013	12:58:16 PM	Main Vac valve opened
2/14/2013	12:58:16 PM	Helium MFC set to  0.000000
2/14/2013	12:58:16 PM	H2 MFC set to  0.000000
2/14/2013	12:58:16 PM	BCl3 MFC set to  0.000000
2/14/2013	12:58:16 PM	PH3 MFC set to  0.000000
2/14/2013	12:58:16 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:58:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:58:16 PM	Tube furnace set to 0
2/14/2013	12:58:46 PM	H2 valve closed
2/14/2013	12:58:46 PM	BCl3 valve closed
2/14/2013	12:58:46 PM	PH3 valve closed
2/14/2013	12:58:46 PM	SiCl4 pre valve closed
2/14/2013	12:58:46 PM	SiCl4 post valve closed
2/14/2013	12:58:46 PM	Bypass valve closed
2/14/2013	12:58:46 PM	Bubbler valve closed
2/14/2013	12:58:46 PM	Helium valve opened
2/14/2013	12:58:46 PM	Main Vac valve opened
2/14/2013	12:58:46 PM	Helium MFC set to  20.000000
2/14/2013	12:58:46 PM	H2 MFC set to  0.000000
2/14/2013	12:58:46 PM	BCl3 MFC set to  0.000000
2/14/2013	12:58:46 PM	PH3 MFC set to  0.000000
2/14/2013	12:58:46 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:58:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:58:46 PM	Tube furnace set to 0
2/14/2013	12:59:16 PM	Helium valve closed
2/14/2013	12:59:16 PM	H2 valve closed
2/14/2013	12:59:16 PM	BCl3 valve closed
2/14/2013	12:59:16 PM	PH3 valve closed
2/14/2013	12:59:16 PM	SiCl4 pre valve closed
2/14/2013	12:59:16 PM	SiCl4 post valve closed
2/14/2013	12:59:16 PM	Bypass valve closed
2/14/2013	12:59:16 PM	Bubbler valve closed
2/14/2013	12:59:16 PM	Main Vac valve opened
2/14/2013	12:59:16 PM	Helium MFC set to  0.000000
2/14/2013	12:59:16 PM	H2 MFC set to  0.000000
2/14/2013	12:59:16 PM	BCl3 MFC set to  0.000000
2/14/2013	12:59:16 PM	PH3 MFC set to  0.000000
2/14/2013	12:59:16 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:59:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:59:16 PM	Tube furnace set to 0
2/14/2013	12:59:46 PM	H2 valve closed
2/14/2013	12:59:46 PM	BCl3 valve closed
2/14/2013	12:59:46 PM	PH3 valve closed
2/14/2013	12:59:46 PM	SiCl4 pre valve closed
2/14/2013	12:59:46 PM	SiCl4 post valve closed
2/14/2013	12:59:46 PM	Bypass valve closed
2/14/2013	12:59:46 PM	Bubbler valve closed
2/14/2013	12:59:46 PM	Helium valve opened
2/14/2013	12:59:46 PM	Main Vac valve opened
2/14/2013	12:59:46 PM	Helium MFC set to  20.000000
2/14/2013	12:59:46 PM	H2 MFC set to  0.000000
2/14/2013	12:59:46 PM	BCl3 MFC set to  0.000000
2/14/2013	12:59:46 PM	PH3 MFC set to  0.000000
2/14/2013	12:59:46 PM	SiCl4 MFC set to  0.000000
2/14/2013	12:59:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	12:59:47 PM	Tube furnace set to 0
2/14/2013	1:00:17 PM	Helium valve closed
2/14/2013	1:00:17 PM	H2 valve closed
2/14/2013	1:00:17 PM	BCl3 valve closed
2/14/2013	1:00:17 PM	PH3 valve closed
2/14/2013	1:00:17 PM	SiCl4 pre valve closed
2/14/2013	1:00:17 PM	SiCl4 post valve closed
2/14/2013	1:00:17 PM	Bypass valve closed
2/14/2013	1:00:17 PM	Bubbler valve closed
2/14/2013	1:00:17 PM	Main Vac valve opened
2/14/2013	1:00:17 PM	Helium MFC set to  0.000000
2/14/2013	1:00:17 PM	H2 MFC set to  0.000000
2/14/2013	1:00:17 PM	BCl3 MFC set to  0.000000
2/14/2013	1:00:17 PM	PH3 MFC set to  0.000000
2/14/2013	1:00:17 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:00:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:00:17 PM	Tube furnace set to 0
2/14/2013	1:00:47 PM	H2 valve closed
2/14/2013	1:00:47 PM	BCl3 valve closed
2/14/2013	1:00:47 PM	PH3 valve closed
2/14/2013	1:00:47 PM	SiCl4 pre valve closed
2/14/2013	1:00:47 PM	SiCl4 post valve closed
2/14/2013	1:00:47 PM	Bypass valve closed
2/14/2013	1:00:47 PM	Bubbler valve closed
2/14/2013	1:00:47 PM	Helium valve opened
2/14/2013	1:00:47 PM	Main Vac valve opened
2/14/2013	1:00:47 PM	Helium MFC set to  20.000000
2/14/2013	1:00:47 PM	H2 MFC set to  0.000000
2/14/2013	1:00:47 PM	BCl3 MFC set to  0.000000
2/14/2013	1:00:47 PM	PH3 MFC set to  0.000000
2/14/2013	1:00:47 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:00:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:00:47 PM	Tube furnace set to 0
2/14/2013	1:01:17 PM	Helium valve closed
2/14/2013	1:01:17 PM	H2 valve closed
2/14/2013	1:01:17 PM	BCl3 valve closed
2/14/2013	1:01:17 PM	PH3 valve closed
2/14/2013	1:01:17 PM	SiCl4 pre valve closed
2/14/2013	1:01:17 PM	SiCl4 post valve closed
2/14/2013	1:01:17 PM	Bypass valve closed
2/14/2013	1:01:17 PM	Bubbler valve closed
2/14/2013	1:01:17 PM	Main Vac valve opened
2/14/2013	1:01:17 PM	Helium MFC set to  0.000000
2/14/2013	1:01:17 PM	H2 MFC set to  0.000000
2/14/2013	1:01:17 PM	BCl3 MFC set to  0.000000
2/14/2013	1:01:17 PM	PH3 MFC set to  0.000000
2/14/2013	1:01:17 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:01:17 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:01:17 PM	Tube furnace set to 0
2/14/2013	1:01:47 PM	H2 valve closed
2/14/2013	1:01:47 PM	BCl3 valve closed
2/14/2013	1:01:47 PM	PH3 valve closed
2/14/2013	1:01:47 PM	SiCl4 pre valve closed
2/14/2013	1:01:47 PM	SiCl4 post valve closed
2/14/2013	1:01:47 PM	Bypass valve closed
2/14/2013	1:01:47 PM	Bubbler valve closed
2/14/2013	1:01:47 PM	Helium valve opened
2/14/2013	1:01:47 PM	Main Vac valve opened
2/14/2013	1:01:47 PM	Helium MFC set to  20.000000
2/14/2013	1:01:47 PM	H2 MFC set to  0.000000
2/14/2013	1:01:47 PM	BCl3 MFC set to  0.000000
2/14/2013	1:01:47 PM	PH3 MFC set to  0.000000
2/14/2013	1:01:47 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:01:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:01:48 PM	Tube furnace set to 0
2/14/2013	1:02:18 PM	Helium valve closed
2/14/2013	1:02:18 PM	H2 valve closed
2/14/2013	1:02:18 PM	BCl3 valve closed
2/14/2013	1:02:18 PM	PH3 valve closed
2/14/2013	1:02:18 PM	SiCl4 pre valve closed
2/14/2013	1:02:18 PM	SiCl4 post valve closed
2/14/2013	1:02:18 PM	Bypass valve closed
2/14/2013	1:02:18 PM	Bubbler valve closed
2/14/2013	1:02:18 PM	Main Vac valve opened
2/14/2013	1:02:18 PM	Helium MFC set to  0.000000
2/14/2013	1:02:18 PM	H2 MFC set to  0.000000
2/14/2013	1:02:18 PM	BCl3 MFC set to  0.000000
2/14/2013	1:02:18 PM	PH3 MFC set to  0.000000
2/14/2013	1:02:18 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:02:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:02:18 PM	Tube furnace set to 0
2/14/2013	1:02:48 PM	H2 valve closed
2/14/2013	1:02:48 PM	BCl3 valve closed
2/14/2013	1:02:48 PM	PH3 valve closed
2/14/2013	1:02:48 PM	SiCl4 pre valve closed
2/14/2013	1:02:48 PM	SiCl4 post valve closed
2/14/2013	1:02:48 PM	Bypass valve closed
2/14/2013	1:02:48 PM	Bubbler valve closed
2/14/2013	1:02:48 PM	Helium valve opened
2/14/2013	1:02:48 PM	Main Vac valve opened
2/14/2013	1:02:48 PM	Helium MFC set to  20.000000
2/14/2013	1:02:48 PM	H2 MFC set to  0.000000
2/14/2013	1:02:48 PM	BCl3 MFC set to  0.000000
2/14/2013	1:02:48 PM	PH3 MFC set to  0.000000
2/14/2013	1:02:48 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:02:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:02:48 PM	Tube furnace set to 0
2/14/2013	1:03:18 PM	Helium valve closed
2/14/2013	1:03:18 PM	H2 valve closed
2/14/2013	1:03:18 PM	BCl3 valve closed
2/14/2013	1:03:18 PM	PH3 valve closed
2/14/2013	1:03:18 PM	SiCl4 pre valve closed
2/14/2013	1:03:18 PM	SiCl4 post valve closed
2/14/2013	1:03:18 PM	Bypass valve closed
2/14/2013	1:03:18 PM	Bubbler valve closed
2/14/2013	1:03:18 PM	Main Vac valve opened
2/14/2013	1:03:18 PM	Helium MFC set to  0.000000
2/14/2013	1:03:18 PM	H2 MFC set to  0.000000
2/14/2013	1:03:18 PM	BCl3 MFC set to  0.000000
2/14/2013	1:03:18 PM	PH3 MFC set to  0.000000
2/14/2013	1:03:18 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:03:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:03:18 PM	Tube furnace set to 0
2/14/2013	1:03:48 PM	H2 valve closed
2/14/2013	1:03:48 PM	BCl3 valve closed
2/14/2013	1:03:48 PM	PH3 valve closed
2/14/2013	1:03:48 PM	SiCl4 pre valve closed
2/14/2013	1:03:48 PM	SiCl4 post valve closed
2/14/2013	1:03:48 PM	Bypass valve closed
2/14/2013	1:03:48 PM	Bubbler valve closed
2/14/2013	1:03:48 PM	Helium valve opened
2/14/2013	1:03:48 PM	Main Vac valve opened
2/14/2013	1:03:48 PM	Helium MFC set to  20.000000
2/14/2013	1:03:48 PM	H2 MFC set to  0.000000
2/14/2013	1:03:48 PM	BCl3 MFC set to  0.000000
2/14/2013	1:03:48 PM	PH3 MFC set to  0.000000
2/14/2013	1:03:48 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:03:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:03:49 PM	Tube furnace set to 0
2/14/2013	1:04:19 PM	Helium valve closed
2/14/2013	1:04:19 PM	H2 valve closed
2/14/2013	1:04:19 PM	BCl3 valve closed
2/14/2013	1:04:19 PM	PH3 valve closed
2/14/2013	1:04:19 PM	SiCl4 pre valve closed
2/14/2013	1:04:19 PM	SiCl4 post valve closed
2/14/2013	1:04:19 PM	Bypass valve closed
2/14/2013	1:04:19 PM	Bubbler valve closed
2/14/2013	1:04:19 PM	Main Vac valve opened
2/14/2013	1:04:19 PM	Helium MFC set to  0.000000
2/14/2013	1:04:19 PM	H2 MFC set to  0.000000
2/14/2013	1:04:19 PM	BCl3 MFC set to  0.000000
2/14/2013	1:04:19 PM	PH3 MFC set to  0.000000
2/14/2013	1:04:19 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:04:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:04:19 PM	Tube furnace set to 0
2/14/2013	1:04:49 PM	H2 valve closed
2/14/2013	1:04:49 PM	BCl3 valve closed
2/14/2013	1:04:49 PM	PH3 valve closed
2/14/2013	1:04:49 PM	SiCl4 pre valve closed
2/14/2013	1:04:49 PM	SiCl4 post valve closed
2/14/2013	1:04:49 PM	Bypass valve closed
2/14/2013	1:04:49 PM	Bubbler valve closed
2/14/2013	1:04:49 PM	Helium valve opened
2/14/2013	1:04:49 PM	Main Vac valve opened
2/14/2013	1:04:49 PM	Helium MFC set to  20.000000
2/14/2013	1:04:49 PM	H2 MFC set to  0.000000
2/14/2013	1:04:49 PM	BCl3 MFC set to  0.000000
2/14/2013	1:04:49 PM	PH3 MFC set to  0.000000
2/14/2013	1:04:49 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:04:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:04:49 PM	Tube furnace set to 0
2/14/2013	1:05:19 PM	Helium valve closed
2/14/2013	1:05:19 PM	H2 valve closed
2/14/2013	1:05:19 PM	BCl3 valve closed
2/14/2013	1:05:19 PM	PH3 valve closed
2/14/2013	1:05:19 PM	SiCl4 pre valve closed
2/14/2013	1:05:19 PM	SiCl4 post valve closed
2/14/2013	1:05:19 PM	Bypass valve closed
2/14/2013	1:05:19 PM	Bubbler valve closed
2/14/2013	1:05:19 PM	Main Vac valve opened
2/14/2013	1:05:19 PM	Helium MFC set to  0.000000
2/14/2013	1:05:19 PM	H2 MFC set to  0.000000
2/14/2013	1:05:19 PM	BCl3 MFC set to  0.000000
2/14/2013	1:05:19 PM	PH3 MFC set to  0.000000
2/14/2013	1:05:19 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:05:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:05:19 PM	Tube furnace set to 0
2/14/2013	1:05:49 PM	H2 valve closed
2/14/2013	1:05:49 PM	BCl3 valve closed
2/14/2013	1:05:49 PM	PH3 valve closed
2/14/2013	1:05:49 PM	SiCl4 pre valve closed
2/14/2013	1:05:49 PM	SiCl4 post valve closed
2/14/2013	1:05:49 PM	Bypass valve closed
2/14/2013	1:05:49 PM	Bubbler valve closed
2/14/2013	1:05:49 PM	Helium valve opened
2/14/2013	1:05:49 PM	Main Vac valve opened
2/14/2013	1:05:49 PM	Helium MFC set to  20.000000
2/14/2013	1:05:49 PM	H2 MFC set to  0.000000
2/14/2013	1:05:49 PM	BCl3 MFC set to  0.000000
2/14/2013	1:05:49 PM	PH3 MFC set to  0.000000
2/14/2013	1:05:49 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:05:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:05:50 PM	Tube furnace set to 0
2/14/2013	1:06:20 PM	Helium valve closed
2/14/2013	1:06:20 PM	H2 valve closed
2/14/2013	1:06:20 PM	BCl3 valve closed
2/14/2013	1:06:20 PM	PH3 valve closed
2/14/2013	1:06:20 PM	SiCl4 pre valve closed
2/14/2013	1:06:20 PM	SiCl4 post valve closed
2/14/2013	1:06:20 PM	Bypass valve closed
2/14/2013	1:06:20 PM	Bubbler valve closed
2/14/2013	1:06:20 PM	Main Vac valve opened
2/14/2013	1:06:20 PM	Helium MFC set to  0.000000
2/14/2013	1:06:20 PM	H2 MFC set to  0.000000
2/14/2013	1:06:20 PM	BCl3 MFC set to  0.000000
2/14/2013	1:06:20 PM	PH3 MFC set to  0.000000
2/14/2013	1:06:20 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:06:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:06:20 PM	Tube furnace set to 0
2/14/2013	1:06:50 PM	H2 valve closed
2/14/2013	1:06:50 PM	BCl3 valve closed
2/14/2013	1:06:50 PM	PH3 valve closed
2/14/2013	1:06:50 PM	SiCl4 pre valve closed
2/14/2013	1:06:50 PM	SiCl4 post valve closed
2/14/2013	1:06:50 PM	Bypass valve closed
2/14/2013	1:06:50 PM	Bubbler valve closed
2/14/2013	1:06:50 PM	Helium valve opened
2/14/2013	1:06:50 PM	Main Vac valve opened
2/14/2013	1:06:50 PM	Helium MFC set to  20.000000
2/14/2013	1:06:50 PM	H2 MFC set to  0.000000
2/14/2013	1:06:50 PM	BCl3 MFC set to  0.000000
2/14/2013	1:06:50 PM	PH3 MFC set to  0.000000
2/14/2013	1:06:50 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:06:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:06:50 PM	Tube furnace set to 0
2/14/2013	1:07:20 PM	Helium valve closed
2/14/2013	1:07:20 PM	H2 valve closed
2/14/2013	1:07:20 PM	BCl3 valve closed
2/14/2013	1:07:20 PM	PH3 valve closed
2/14/2013	1:07:20 PM	SiCl4 pre valve closed
2/14/2013	1:07:20 PM	SiCl4 post valve closed
2/14/2013	1:07:20 PM	Bypass valve closed
2/14/2013	1:07:20 PM	Bubbler valve closed
2/14/2013	1:07:20 PM	Main Vac valve opened
2/14/2013	1:07:20 PM	Helium MFC set to  0.000000
2/14/2013	1:07:20 PM	H2 MFC set to  0.000000
2/14/2013	1:07:20 PM	BCl3 MFC set to  0.000000
2/14/2013	1:07:20 PM	PH3 MFC set to  0.000000
2/14/2013	1:07:20 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:07:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:07:20 PM	Tube furnace set to 0
2/14/2013	1:07:21 PM	Run finished at 1:07 PM
2/14/2013	1:07:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	1:22:49 PM	Main Vac valve closed
2/14/2013	1:23:01 PM	Main Vac valve opened
2/14/2013	1:26:04 PM	Recipe started at 1:26 PM
2/14/2013	1:26:04 PM	Helium valve closed
2/14/2013	1:26:04 PM	H2 valve closed
2/14/2013	1:26:04 PM	BCl3 valve closed
2/14/2013	1:26:04 PM	PH3 valve closed
2/14/2013	1:26:04 PM	SiCl4 pre valve closed
2/14/2013	1:26:04 PM	SiCl4 post valve closed
2/14/2013	1:26:04 PM	Main Vac valve closed
2/14/2013	1:26:04 PM	Bypass valve closed
2/14/2013	1:26:04 PM	Bubbler valve closed
2/14/2013	1:26:04 PM	Helium MFC set to  0.000000
2/14/2013	1:26:04 PM	H2 MFC set to  0.000000
2/14/2013	1:26:04 PM	BCl3 MFC set to  0.000000
2/14/2013	1:26:04 PM	PH3 MFC set to  0.000000
2/14/2013	1:26:04 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:26:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:26:05 PM	Tube furnace set to 0
2/14/2013	1:26:08 PM	Helium valve closed
2/14/2013	1:26:08 PM	BCl3 valve closed
2/14/2013	1:26:08 PM	PH3 valve closed
2/14/2013	1:26:08 PM	SiCl4 pre valve closed
2/14/2013	1:26:08 PM	SiCl4 post valve closed
2/14/2013	1:26:08 PM	Main Vac valve closed
2/14/2013	1:26:08 PM	Bypass valve closed
2/14/2013	1:26:08 PM	Bubbler valve closed
2/14/2013	1:26:08 PM	H2 valve opened
2/14/2013	1:26:08 PM	Helium MFC set to  0.000000
2/14/2013	1:26:08 PM	H2 MFC set to  500.000000
2/14/2013	1:26:08 PM	BCl3 MFC set to  0.000000
2/14/2013	1:26:08 PM	PH3 MFC set to  0.000000
2/14/2013	1:26:08 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:26:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:26:08 PM	Tube furnace set to 0
2/14/2013	1:27:19 PM	Helium valve closed
2/14/2013	1:27:19 PM	BCl3 valve closed
2/14/2013	1:27:19 PM	PH3 valve closed
2/14/2013	1:27:19 PM	SiCl4 pre valve closed
2/14/2013	1:27:19 PM	SiCl4 post valve closed
2/14/2013	1:27:19 PM	Main Vac valve closed
2/14/2013	1:27:19 PM	Bypass valve closed
2/14/2013	1:27:19 PM	H2 valve opened
2/14/2013	1:27:19 PM	Bubbler valve opened
2/14/2013	1:27:19 PM	Helium MFC set to  0.000000
2/14/2013	1:27:19 PM	H2 MFC set to  500.000000
2/14/2013	1:27:19 PM	BCl3 MFC set to  0.000000
2/14/2013	1:27:19 PM	PH3 MFC set to  0.000000
2/14/2013	1:27:19 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:27:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:27:19 PM	Tube furnace set to 0
2/14/2013	1:27:20 PM	Helium valve closed
2/14/2013	1:27:20 PM	BCl3 valve closed
2/14/2013	1:27:20 PM	PH3 valve closed
2/14/2013	1:27:20 PM	SiCl4 pre valve closed
2/14/2013	1:27:20 PM	SiCl4 post valve closed
2/14/2013	1:27:20 PM	Main Vac valve closed
2/14/2013	1:27:20 PM	Bypass valve closed
2/14/2013	1:27:20 PM	H2 valve opened
2/14/2013	1:27:20 PM	Bubbler valve opened
2/14/2013	1:27:20 PM	Helium MFC set to  0.000000
2/14/2013	1:27:20 PM	H2 MFC set to  500.000000
2/14/2013	1:27:20 PM	BCl3 MFC set to  0.000000
2/14/2013	1:27:20 PM	PH3 MFC set to  0.000000
2/14/2013	1:27:20 PM	SiCl4 MFC set to  0.000000
2/14/2013	1:27:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:27:20 PM	Tube furnace set to 1000
2/14/2013	1:47:20 PM	Helium valve closed
2/14/2013	1:47:20 PM	BCl3 valve closed
2/14/2013	1:47:20 PM	Main Vac valve closed
2/14/2013	1:47:20 PM	Bypass valve closed
2/14/2013	1:47:20 PM	H2 valve opened
2/14/2013	1:47:20 PM	PH3 valve opened
2/14/2013	1:47:20 PM	SiCl4 pre valve opened
2/14/2013	1:47:20 PM	SiCl4 post valve opened
2/14/2013	1:47:20 PM	Bubbler valve opened
2/14/2013	1:47:20 PM	Helium MFC set to  0.000000
2/14/2013	1:47:20 PM	H2 MFC set to  450.000000
2/14/2013	1:47:20 PM	BCl3 MFC set to  0.000000
2/14/2013	1:47:20 PM	PH3 MFC set to  20.000000
2/14/2013	1:47:20 PM	SiCl4 MFC set to  50.000000
2/14/2013	1:47:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:47:20 PM	Tube furnace set to 1000
2/14/2013	1:52:20 PM	Helium valve closed
2/14/2013	1:52:20 PM	BCl3 valve closed
2/14/2013	1:52:20 PM	Main Vac valve closed
2/14/2013	1:52:20 PM	Bypass valve closed
2/14/2013	1:52:20 PM	H2 valve opened
2/14/2013	1:52:20 PM	PH3 valve opened
2/14/2013	1:52:20 PM	SiCl4 pre valve opened
2/14/2013	1:52:20 PM	SiCl4 post valve opened
2/14/2013	1:52:20 PM	Bubbler valve opened
2/14/2013	1:52:20 PM	Helium MFC set to  0.000000
2/14/2013	1:52:20 PM	H2 MFC set to  450.000000
2/14/2013	1:52:20 PM	BCl3 MFC set to  0.000000
2/14/2013	1:52:20 PM	PH3 MFC set to  1.300000
2/14/2013	1:52:20 PM	SiCl4 MFC set to  50.000000
2/14/2013	1:52:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	1:52:20 PM	Tube furnace set to 1000
2/14/2013	2:07:20 PM	Helium valve closed
2/14/2013	2:07:20 PM	BCl3 valve closed
2/14/2013	2:07:20 PM	PH3 valve closed
2/14/2013	2:07:20 PM	SiCl4 pre valve closed
2/14/2013	2:07:20 PM	SiCl4 post valve closed
2/14/2013	2:07:20 PM	Main Vac valve closed
2/14/2013	2:07:20 PM	Bypass valve closed
2/14/2013	2:07:21 PM	H2 valve opened
2/14/2013	2:07:21 PM	Bubbler valve opened
2/14/2013	2:07:21 PM	Helium MFC set to  0.000000
2/14/2013	2:07:21 PM	H2 MFC set to  500.000000
2/14/2013	2:07:21 PM	BCl3 MFC set to  0.000000
2/14/2013	2:07:21 PM	PH3 MFC set to  0.000000
2/14/2013	2:07:21 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:07:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:07:21 PM	Tube furnace set to 900
2/14/2013	2:12:21 PM	Helium valve closed
2/14/2013	2:12:21 PM	BCl3 valve closed
2/14/2013	2:12:21 PM	PH3 valve closed
2/14/2013	2:12:21 PM	SiCl4 pre valve closed
2/14/2013	2:12:21 PM	SiCl4 post valve closed
2/14/2013	2:12:21 PM	Main Vac valve closed
2/14/2013	2:12:21 PM	Bypass valve closed
2/14/2013	2:12:21 PM	H2 valve opened
2/14/2013	2:12:21 PM	Bubbler valve opened
2/14/2013	2:12:21 PM	Helium MFC set to  0.000000
2/14/2013	2:12:21 PM	H2 MFC set to  500.000000
2/14/2013	2:12:21 PM	BCl3 MFC set to  0.000000
2/14/2013	2:12:21 PM	PH3 MFC set to  0.000000
2/14/2013	2:12:21 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:12:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:12:21 PM	Tube furnace set to 800
2/14/2013	2:17:21 PM	Helium valve closed
2/14/2013	2:17:21 PM	BCl3 valve closed
2/14/2013	2:17:21 PM	PH3 valve closed
2/14/2013	2:17:21 PM	SiCl4 pre valve closed
2/14/2013	2:17:21 PM	SiCl4 post valve closed
2/14/2013	2:17:21 PM	Main Vac valve closed
2/14/2013	2:17:21 PM	Bypass valve closed
2/14/2013	2:17:21 PM	H2 valve opened
2/14/2013	2:17:21 PM	Bubbler valve opened
2/14/2013	2:17:21 PM	Helium MFC set to  0.000000
2/14/2013	2:17:21 PM	H2 MFC set to  500.000000
2/14/2013	2:17:21 PM	BCl3 MFC set to  0.000000
2/14/2013	2:17:21 PM	PH3 MFC set to  0.000000
2/14/2013	2:17:21 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:17:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:17:21 PM	Tube furnace set to 700
2/14/2013	2:22:21 PM	Helium valve closed
2/14/2013	2:22:21 PM	BCl3 valve closed
2/14/2013	2:22:21 PM	PH3 valve closed
2/14/2013	2:22:21 PM	SiCl4 pre valve closed
2/14/2013	2:22:21 PM	SiCl4 post valve closed
2/14/2013	2:22:21 PM	Main Vac valve closed
2/14/2013	2:22:21 PM	Bypass valve closed
2/14/2013	2:22:21 PM	H2 valve opened
2/14/2013	2:22:21 PM	Bubbler valve opened
2/14/2013	2:22:21 PM	Helium MFC set to  0.000000
2/14/2013	2:22:21 PM	H2 MFC set to  500.000000
2/14/2013	2:22:21 PM	BCl3 MFC set to  0.000000
2/14/2013	2:22:21 PM	PH3 MFC set to  0.000000
2/14/2013	2:22:21 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:22:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:22:21 PM	Tube furnace set to 600
2/14/2013	2:27:21 PM	H2 valve closed
2/14/2013	2:27:21 PM	BCl3 valve closed
2/14/2013	2:27:21 PM	PH3 valve closed
2/14/2013	2:27:21 PM	SiCl4 pre valve closed
2/14/2013	2:27:21 PM	SiCl4 post valve closed
2/14/2013	2:27:21 PM	Main Vac valve closed
2/14/2013	2:27:21 PM	Bypass valve closed
2/14/2013	2:27:21 PM	Helium valve opened
2/14/2013	2:27:21 PM	Bubbler valve opened
2/14/2013	2:27:21 PM	Helium MFC set to  500.000000
2/14/2013	2:27:21 PM	H2 MFC set to  0.000000
2/14/2013	2:27:21 PM	BCl3 MFC set to  0.000000
2/14/2013	2:27:21 PM	PH3 MFC set to  0.000000
2/14/2013	2:27:21 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:27:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:27:22 PM	Tube furnace set to 0
2/14/2013	2:47:22 PM	Helium valve closed
2/14/2013	2:47:22 PM	H2 valve closed
2/14/2013	2:47:22 PM	BCl3 valve closed
2/14/2013	2:47:22 PM	PH3 valve closed
2/14/2013	2:47:22 PM	SiCl4 pre valve closed
2/14/2013	2:47:22 PM	SiCl4 post valve closed
2/14/2013	2:47:22 PM	Main Vac valve closed
2/14/2013	2:47:22 PM	Bypass valve closed
2/14/2013	2:47:22 PM	Bubbler valve closed
2/14/2013	2:47:22 PM	Helium MFC set to  0.000000
2/14/2013	2:47:22 PM	H2 MFC set to  0.000000
2/14/2013	2:47:22 PM	BCl3 MFC set to  0.000000
2/14/2013	2:47:22 PM	PH3 MFC set to  0.000000
2/14/2013	2:47:22 PM	SiCl4 MFC set to  0.000000
2/14/2013	2:47:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	2:47:22 PM	Tube furnace set to 0
2/14/2013	2:47:23 PM	Run finished at 2:47 PM
2/14/2013	3:13:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	3:13:08 PM	Recipe started at 3:13 PM
2/14/2013	3:13:09 PM	Helium valve closed
2/14/2013	3:13:09 PM	H2 valve closed
2/14/2013	3:13:09 PM	BCl3 valve closed
2/14/2013	3:13:09 PM	PH3 valve closed
2/14/2013	3:13:09 PM	SiCl4 pre valve closed
2/14/2013	3:13:09 PM	SiCl4 post valve closed
2/14/2013	3:13:09 PM	Main Vac valve closed
2/14/2013	3:13:09 PM	Bypass valve closed
2/14/2013	3:13:09 PM	Bubbler valve closed
2/14/2013	3:13:09 PM	Helium MFC set to  0.000000
2/14/2013	3:13:09 PM	H2 MFC set to  0.000000
2/14/2013	3:13:09 PM	BCl3 MFC set to  0.000000
2/14/2013	3:13:09 PM	PH3 MFC set to  0.000000
2/14/2013	3:13:09 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:13:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:13:09 PM	Tube furnace set to 0
2/14/2013	3:13:12 PM	H2 valve closed
2/14/2013	3:13:12 PM	BCl3 valve closed
2/14/2013	3:13:12 PM	PH3 valve closed
2/14/2013	3:13:12 PM	SiCl4 pre valve closed
2/14/2013	3:13:12 PM	SiCl4 post valve closed
2/14/2013	3:13:12 PM	Main Vac valve closed
2/14/2013	3:13:12 PM	Bypass valve closed
2/14/2013	3:13:12 PM	Bubbler valve closed
2/14/2013	3:13:12 PM	Helium valve opened
2/14/2013	3:13:12 PM	Helium MFC set to  500.000000
2/14/2013	3:13:12 PM	H2 MFC set to  0.000000
2/14/2013	3:13:12 PM	BCl3 MFC set to  0.000000
2/14/2013	3:13:12 PM	PH3 MFC set to  0.000000
2/14/2013	3:13:12 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:13:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:13:12 PM	Tube furnace set to 0
2/14/2013	3:13:12 PM	Helium valve closed
2/14/2013	3:13:12 PM	H2 valve closed
2/14/2013	3:13:12 PM	BCl3 valve closed
2/14/2013	3:13:12 PM	PH3 valve closed
2/14/2013	3:13:12 PM	SiCl4 pre valve closed
2/14/2013	3:13:12 PM	SiCl4 post valve closed
2/14/2013	3:13:12 PM	Main Vac valve closed
2/14/2013	3:13:12 PM	Bypass valve closed
2/14/2013	3:13:12 PM	Bubbler valve closed
2/14/2013	3:13:12 PM	Helium MFC set to  0.000000
2/14/2013	3:13:12 PM	H2 MFC set to  0.000000
2/14/2013	3:13:12 PM	BCl3 MFC set to  0.000000
2/14/2013	3:13:12 PM	PH3 MFC set to  0.000000
2/14/2013	3:13:12 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:13:12 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:13:12 PM	Tube furnace set to 0
2/14/2013	3:13:13 PM	Run finished at 3:13 PM
2/14/2013	3:13:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	3:15:41 PM	Tube furnace set to 200
2/14/2013	3:15:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	3:15:45 PM	Recipe started at 3:15 PM
2/14/2013	3:15:45 PM	Helium valve closed
2/14/2013	3:15:45 PM	H2 valve closed
2/14/2013	3:15:45 PM	BCl3 valve closed
2/14/2013	3:15:45 PM	PH3 valve closed
2/14/2013	3:15:45 PM	SiCl4 pre valve closed
2/14/2013	3:15:45 PM	SiCl4 post valve closed
2/14/2013	3:15:45 PM	Main Vac valve closed
2/14/2013	3:15:45 PM	Bubbler valve closed
2/14/2013	3:15:45 PM	Bypass valve opened
2/14/2013	3:15:45 PM	Helium MFC set to  0.000000
2/14/2013	3:15:45 PM	H2 MFC set to  0.000000
2/14/2013	3:15:45 PM	BCl3 MFC set to  0.000000
2/14/2013	3:15:45 PM	PH3 MFC set to  0.000000
2/14/2013	3:15:45 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:15:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:15:45 PM	Tube furnace set to 0
2/14/2013	3:16:52 PM	Helium valve closed
2/14/2013	3:16:52 PM	H2 valve closed
2/14/2013	3:16:52 PM	BCl3 valve closed
2/14/2013	3:16:52 PM	PH3 valve closed
2/14/2013	3:16:52 PM	SiCl4 pre valve closed
2/14/2013	3:16:52 PM	SiCl4 post valve closed
2/14/2013	3:16:52 PM	Main Vac valve closed
2/14/2013	3:16:52 PM	Bubbler valve closed
2/14/2013	3:16:52 PM	Bypass valve opened
2/14/2013	3:16:52 PM	Helium MFC set to  0.000000
2/14/2013	3:16:52 PM	H2 MFC set to  0.000000
2/14/2013	3:16:52 PM	BCl3 MFC set to  0.000000
2/14/2013	3:16:52 PM	PH3 MFC set to  0.000000
2/14/2013	3:16:52 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:16:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:16:53 PM	Tube furnace set to 0
2/14/2013	3:17:53 PM	Helium valve closed
2/14/2013	3:17:53 PM	H2 valve closed
2/14/2013	3:17:53 PM	BCl3 valve closed
2/14/2013	3:17:53 PM	PH3 valve closed
2/14/2013	3:17:53 PM	SiCl4 pre valve closed
2/14/2013	3:17:53 PM	SiCl4 post valve closed
2/14/2013	3:17:53 PM	Bypass valve closed
2/14/2013	3:17:53 PM	Bubbler valve closed
2/14/2013	3:17:53 PM	Main Vac valve opened
2/14/2013	3:17:53 PM	Helium MFC set to  0.000000
2/14/2013	3:17:53 PM	H2 MFC set to  0.000000
2/14/2013	3:17:53 PM	BCl3 MFC set to  0.000000
2/14/2013	3:17:53 PM	PH3 MFC set to  0.000000
2/14/2013	3:17:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:17:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:17:53 PM	Tube furnace set to 0
2/14/2013	3:17:54 PM	Run finished at 3:17 PM
2/14/2013	3:17:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	3:31:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	3:31:28 PM	Recipe started at 3:31 PM
2/14/2013	3:31:28 PM	Helium valve closed
2/14/2013	3:31:28 PM	H2 valve closed
2/14/2013	3:31:28 PM	BCl3 valve closed
2/14/2013	3:31:28 PM	PH3 valve closed
2/14/2013	3:31:28 PM	SiCl4 pre valve closed
2/14/2013	3:31:28 PM	SiCl4 post valve closed
2/14/2013	3:31:28 PM	Main Vac valve closed
2/14/2013	3:31:28 PM	Bubbler valve closed
2/14/2013	3:31:28 PM	Bypass valve opened
2/14/2013	3:31:28 PM	Helium MFC set to  0.000000
2/14/2013	3:31:28 PM	H2 MFC set to  0.000000
2/14/2013	3:31:28 PM	BCl3 MFC set to  0.000000
2/14/2013	3:31:28 PM	PH3 MFC set to  0.000000
2/14/2013	3:31:28 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:31:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:31:28 PM	Tube furnace set to 0
2/14/2013	3:31:29 PM	Helium valve closed
2/14/2013	3:31:29 PM	H2 valve closed
2/14/2013	3:31:29 PM	BCl3 valve closed
2/14/2013	3:31:29 PM	PH3 valve closed
2/14/2013	3:31:29 PM	SiCl4 pre valve closed
2/14/2013	3:31:29 PM	SiCl4 post valve closed
2/14/2013	3:31:29 PM	Main Vac valve closed
2/14/2013	3:31:29 PM	Bubbler valve closed
2/14/2013	3:31:29 PM	Bypass valve opened
2/14/2013	3:31:29 PM	Helium MFC set to  0.000000
2/14/2013	3:31:29 PM	H2 MFC set to  0.000000
2/14/2013	3:31:29 PM	BCl3 MFC set to  0.000000
2/14/2013	3:31:29 PM	PH3 MFC set to  0.000000
2/14/2013	3:31:29 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:31:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:31:29 PM	Tube furnace set to 0
2/14/2013	3:31:59 PM	Helium valve closed
2/14/2013	3:31:59 PM	H2 valve closed
2/14/2013	3:31:59 PM	BCl3 valve closed
2/14/2013	3:31:59 PM	PH3 valve closed
2/14/2013	3:31:59 PM	SiCl4 pre valve closed
2/14/2013	3:31:59 PM	SiCl4 post valve closed
2/14/2013	3:31:59 PM	Bypass valve closed
2/14/2013	3:31:59 PM	Bubbler valve closed
2/14/2013	3:31:59 PM	Main Vac valve opened
2/14/2013	3:31:59 PM	Helium MFC set to  0.000000
2/14/2013	3:31:59 PM	H2 MFC set to  0.000000
2/14/2013	3:31:59 PM	BCl3 MFC set to  0.000000
2/14/2013	3:31:59 PM	PH3 MFC set to  0.000000
2/14/2013	3:31:59 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:31:59 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:31:59 PM	Tube furnace set to 0
2/14/2013	3:32:29 PM	H2 valve closed
2/14/2013	3:32:29 PM	BCl3 valve closed
2/14/2013	3:32:29 PM	PH3 valve closed
2/14/2013	3:32:29 PM	SiCl4 pre valve closed
2/14/2013	3:32:29 PM	SiCl4 post valve closed
2/14/2013	3:32:29 PM	Bypass valve closed
2/14/2013	3:32:29 PM	Bubbler valve closed
2/14/2013	3:32:29 PM	Helium valve opened
2/14/2013	3:32:29 PM	Main Vac valve opened
2/14/2013	3:32:29 PM	Helium MFC set to  20.000000
2/14/2013	3:32:29 PM	H2 MFC set to  0.000000
2/14/2013	3:32:29 PM	BCl3 MFC set to  0.000000
2/14/2013	3:32:29 PM	PH3 MFC set to  0.000000
2/14/2013	3:32:29 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:32:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:32:29 PM	Tube furnace set to 0
2/14/2013	3:33:00 PM	Helium valve closed
2/14/2013	3:33:00 PM	H2 valve closed
2/14/2013	3:33:00 PM	BCl3 valve closed
2/14/2013	3:33:00 PM	PH3 valve closed
2/14/2013	3:33:00 PM	SiCl4 pre valve closed
2/14/2013	3:33:00 PM	SiCl4 post valve closed
2/14/2013	3:33:00 PM	Bypass valve closed
2/14/2013	3:33:00 PM	Bubbler valve closed
2/14/2013	3:33:00 PM	Main Vac valve opened
2/14/2013	3:33:00 PM	Helium MFC set to  0.000000
2/14/2013	3:33:00 PM	H2 MFC set to  0.000000
2/14/2013	3:33:00 PM	BCl3 MFC set to  0.000000
2/14/2013	3:33:00 PM	PH3 MFC set to  0.000000
2/14/2013	3:33:00 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:33:00 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:33:00 PM	Tube furnace set to 0
2/14/2013	3:33:30 PM	H2 valve closed
2/14/2013	3:33:30 PM	BCl3 valve closed
2/14/2013	3:33:30 PM	PH3 valve closed
2/14/2013	3:33:30 PM	SiCl4 pre valve closed
2/14/2013	3:33:30 PM	SiCl4 post valve closed
2/14/2013	3:33:30 PM	Bypass valve closed
2/14/2013	3:33:30 PM	Bubbler valve closed
2/14/2013	3:33:30 PM	Helium valve opened
2/14/2013	3:33:30 PM	Main Vac valve opened
2/14/2013	3:33:30 PM	Helium MFC set to  20.000000
2/14/2013	3:33:30 PM	H2 MFC set to  0.000000
2/14/2013	3:33:30 PM	BCl3 MFC set to  0.000000
2/14/2013	3:33:30 PM	PH3 MFC set to  0.000000
2/14/2013	3:33:30 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:33:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:33:30 PM	Tube furnace set to 0
2/14/2013	3:34:00 PM	Helium valve closed
2/14/2013	3:34:00 PM	H2 valve closed
2/14/2013	3:34:00 PM	BCl3 valve closed
2/14/2013	3:34:00 PM	PH3 valve closed
2/14/2013	3:34:00 PM	SiCl4 pre valve closed
2/14/2013	3:34:00 PM	SiCl4 post valve closed
2/14/2013	3:34:00 PM	Bypass valve closed
2/14/2013	3:34:00 PM	Bubbler valve closed
2/14/2013	3:34:00 PM	Main Vac valve opened
2/14/2013	3:34:00 PM	Helium MFC set to  0.000000
2/14/2013	3:34:00 PM	H2 MFC set to  0.000000
2/14/2013	3:34:00 PM	BCl3 MFC set to  0.000000
2/14/2013	3:34:00 PM	PH3 MFC set to  0.000000
2/14/2013	3:34:00 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:34:00 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:34:00 PM	Tube furnace set to 0
2/14/2013	3:34:30 PM	H2 valve closed
2/14/2013	3:34:30 PM	BCl3 valve closed
2/14/2013	3:34:30 PM	PH3 valve closed
2/14/2013	3:34:30 PM	SiCl4 pre valve closed
2/14/2013	3:34:30 PM	SiCl4 post valve closed
2/14/2013	3:34:30 PM	Bypass valve closed
2/14/2013	3:34:30 PM	Bubbler valve closed
2/14/2013	3:34:30 PM	Helium valve opened
2/14/2013	3:34:30 PM	Main Vac valve opened
2/14/2013	3:34:30 PM	Helium MFC set to  20.000000
2/14/2013	3:34:30 PM	H2 MFC set to  0.000000
2/14/2013	3:34:30 PM	BCl3 MFC set to  0.000000
2/14/2013	3:34:30 PM	PH3 MFC set to  0.000000
2/14/2013	3:34:30 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:34:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:34:30 PM	Tube furnace set to 0
2/14/2013	3:35:01 PM	Helium valve closed
2/14/2013	3:35:01 PM	H2 valve closed
2/14/2013	3:35:01 PM	BCl3 valve closed
2/14/2013	3:35:01 PM	PH3 valve closed
2/14/2013	3:35:01 PM	SiCl4 pre valve closed
2/14/2013	3:35:01 PM	SiCl4 post valve closed
2/14/2013	3:35:01 PM	Bypass valve closed
2/14/2013	3:35:01 PM	Bubbler valve closed
2/14/2013	3:35:01 PM	Main Vac valve opened
2/14/2013	3:35:01 PM	Helium MFC set to  0.000000
2/14/2013	3:35:01 PM	H2 MFC set to  0.000000
2/14/2013	3:35:01 PM	BCl3 MFC set to  0.000000
2/14/2013	3:35:01 PM	PH3 MFC set to  0.000000
2/14/2013	3:35:01 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:35:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:35:01 PM	Tube furnace set to 0
2/14/2013	3:35:31 PM	H2 valve closed
2/14/2013	3:35:31 PM	BCl3 valve closed
2/14/2013	3:35:31 PM	PH3 valve closed
2/14/2013	3:35:31 PM	SiCl4 pre valve closed
2/14/2013	3:35:31 PM	SiCl4 post valve closed
2/14/2013	3:35:31 PM	Bypass valve closed
2/14/2013	3:35:31 PM	Bubbler valve closed
2/14/2013	3:35:31 PM	Helium valve opened
2/14/2013	3:35:31 PM	Main Vac valve opened
2/14/2013	3:35:31 PM	Helium MFC set to  20.000000
2/14/2013	3:35:31 PM	H2 MFC set to  0.000000
2/14/2013	3:35:31 PM	BCl3 MFC set to  0.000000
2/14/2013	3:35:31 PM	PH3 MFC set to  0.000000
2/14/2013	3:35:31 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:35:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:35:31 PM	Tube furnace set to 0
2/14/2013	3:36:01 PM	Helium valve closed
2/14/2013	3:36:01 PM	H2 valve closed
2/14/2013	3:36:01 PM	BCl3 valve closed
2/14/2013	3:36:01 PM	PH3 valve closed
2/14/2013	3:36:01 PM	SiCl4 pre valve closed
2/14/2013	3:36:01 PM	SiCl4 post valve closed
2/14/2013	3:36:01 PM	Bypass valve closed
2/14/2013	3:36:01 PM	Bubbler valve closed
2/14/2013	3:36:01 PM	Main Vac valve opened
2/14/2013	3:36:01 PM	Helium MFC set to  0.000000
2/14/2013	3:36:01 PM	H2 MFC set to  0.000000
2/14/2013	3:36:01 PM	BCl3 MFC set to  0.000000
2/14/2013	3:36:01 PM	PH3 MFC set to  0.000000
2/14/2013	3:36:01 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:36:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:36:01 PM	Tube furnace set to 0
2/14/2013	3:36:31 PM	H2 valve closed
2/14/2013	3:36:31 PM	BCl3 valve closed
2/14/2013	3:36:31 PM	PH3 valve closed
2/14/2013	3:36:31 PM	SiCl4 pre valve closed
2/14/2013	3:36:31 PM	SiCl4 post valve closed
2/14/2013	3:36:31 PM	Bypass valve closed
2/14/2013	3:36:31 PM	Bubbler valve closed
2/14/2013	3:36:31 PM	Helium valve opened
2/14/2013	3:36:31 PM	Main Vac valve opened
2/14/2013	3:36:31 PM	Helium MFC set to  20.000000
2/14/2013	3:36:31 PM	H2 MFC set to  0.000000
2/14/2013	3:36:31 PM	BCl3 MFC set to  0.000000
2/14/2013	3:36:31 PM	PH3 MFC set to  0.000000
2/14/2013	3:36:31 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:36:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:36:31 PM	Tube furnace set to 0
2/14/2013	3:37:02 PM	Helium valve closed
2/14/2013	3:37:02 PM	H2 valve closed
2/14/2013	3:37:02 PM	BCl3 valve closed
2/14/2013	3:37:02 PM	PH3 valve closed
2/14/2013	3:37:02 PM	SiCl4 pre valve closed
2/14/2013	3:37:02 PM	SiCl4 post valve closed
2/14/2013	3:37:02 PM	Bypass valve closed
2/14/2013	3:37:02 PM	Bubbler valve closed
2/14/2013	3:37:02 PM	Main Vac valve opened
2/14/2013	3:37:02 PM	Helium MFC set to  0.000000
2/14/2013	3:37:02 PM	H2 MFC set to  0.000000
2/14/2013	3:37:02 PM	BCl3 MFC set to  0.000000
2/14/2013	3:37:02 PM	PH3 MFC set to  0.000000
2/14/2013	3:37:02 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:37:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:37:02 PM	Tube furnace set to 0
2/14/2013	3:37:32 PM	H2 valve closed
2/14/2013	3:37:32 PM	BCl3 valve closed
2/14/2013	3:37:32 PM	PH3 valve closed
2/14/2013	3:37:32 PM	SiCl4 pre valve closed
2/14/2013	3:37:32 PM	SiCl4 post valve closed
2/14/2013	3:37:32 PM	Bypass valve closed
2/14/2013	3:37:32 PM	Bubbler valve closed
2/14/2013	3:37:32 PM	Helium valve opened
2/14/2013	3:37:32 PM	Main Vac valve opened
2/14/2013	3:37:32 PM	Helium MFC set to  20.000000
2/14/2013	3:37:32 PM	H2 MFC set to  0.000000
2/14/2013	3:37:32 PM	BCl3 MFC set to  0.000000
2/14/2013	3:37:32 PM	PH3 MFC set to  0.000000
2/14/2013	3:37:32 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:37:32 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:37:32 PM	Tube furnace set to 0
2/14/2013	3:38:02 PM	Helium valve closed
2/14/2013	3:38:02 PM	H2 valve closed
2/14/2013	3:38:02 PM	BCl3 valve closed
2/14/2013	3:38:02 PM	PH3 valve closed
2/14/2013	3:38:02 PM	SiCl4 pre valve closed
2/14/2013	3:38:02 PM	SiCl4 post valve closed
2/14/2013	3:38:02 PM	Bypass valve closed
2/14/2013	3:38:02 PM	Bubbler valve closed
2/14/2013	3:38:02 PM	Main Vac valve opened
2/14/2013	3:38:02 PM	Helium MFC set to  0.000000
2/14/2013	3:38:02 PM	H2 MFC set to  0.000000
2/14/2013	3:38:02 PM	BCl3 MFC set to  0.000000
2/14/2013	3:38:02 PM	PH3 MFC set to  0.000000
2/14/2013	3:38:02 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:38:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:38:02 PM	Tube furnace set to 0
2/14/2013	3:38:32 PM	H2 valve closed
2/14/2013	3:38:32 PM	BCl3 valve closed
2/14/2013	3:38:32 PM	PH3 valve closed
2/14/2013	3:38:32 PM	SiCl4 pre valve closed
2/14/2013	3:38:32 PM	SiCl4 post valve closed
2/14/2013	3:38:32 PM	Bypass valve closed
2/14/2013	3:38:32 PM	Bubbler valve closed
2/14/2013	3:38:32 PM	Helium valve opened
2/14/2013	3:38:32 PM	Main Vac valve opened
2/14/2013	3:38:32 PM	Helium MFC set to  20.000000
2/14/2013	3:38:32 PM	H2 MFC set to  0.000000
2/14/2013	3:38:32 PM	BCl3 MFC set to  0.000000
2/14/2013	3:38:32 PM	PH3 MFC set to  0.000000
2/14/2013	3:38:32 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:38:32 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:38:33 PM	Tube furnace set to 0
2/14/2013	3:39:03 PM	Helium valve closed
2/14/2013	3:39:03 PM	H2 valve closed
2/14/2013	3:39:03 PM	BCl3 valve closed
2/14/2013	3:39:03 PM	PH3 valve closed
2/14/2013	3:39:03 PM	SiCl4 pre valve closed
2/14/2013	3:39:03 PM	SiCl4 post valve closed
2/14/2013	3:39:03 PM	Bypass valve closed
2/14/2013	3:39:03 PM	Bubbler valve closed
2/14/2013	3:39:03 PM	Main Vac valve opened
2/14/2013	3:39:03 PM	Helium MFC set to  0.000000
2/14/2013	3:39:03 PM	H2 MFC set to  0.000000
2/14/2013	3:39:03 PM	BCl3 MFC set to  0.000000
2/14/2013	3:39:03 PM	PH3 MFC set to  0.000000
2/14/2013	3:39:03 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:39:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:39:03 PM	Tube furnace set to 0
2/14/2013	3:39:33 PM	H2 valve closed
2/14/2013	3:39:33 PM	BCl3 valve closed
2/14/2013	3:39:33 PM	PH3 valve closed
2/14/2013	3:39:33 PM	SiCl4 pre valve closed
2/14/2013	3:39:33 PM	SiCl4 post valve closed
2/14/2013	3:39:33 PM	Bypass valve closed
2/14/2013	3:39:33 PM	Bubbler valve closed
2/14/2013	3:39:33 PM	Helium valve opened
2/14/2013	3:39:33 PM	Main Vac valve opened
2/14/2013	3:39:33 PM	Helium MFC set to  20.000000
2/14/2013	3:39:33 PM	H2 MFC set to  0.000000
2/14/2013	3:39:33 PM	BCl3 MFC set to  0.000000
2/14/2013	3:39:33 PM	PH3 MFC set to  0.000000
2/14/2013	3:39:33 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:39:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:39:33 PM	Tube furnace set to 0
2/14/2013	3:40:03 PM	Helium valve closed
2/14/2013	3:40:03 PM	H2 valve closed
2/14/2013	3:40:03 PM	BCl3 valve closed
2/14/2013	3:40:03 PM	PH3 valve closed
2/14/2013	3:40:03 PM	SiCl4 pre valve closed
2/14/2013	3:40:03 PM	SiCl4 post valve closed
2/14/2013	3:40:03 PM	Bypass valve closed
2/14/2013	3:40:03 PM	Bubbler valve closed
2/14/2013	3:40:03 PM	Main Vac valve opened
2/14/2013	3:40:03 PM	Helium MFC set to  0.000000
2/14/2013	3:40:03 PM	H2 MFC set to  0.000000
2/14/2013	3:40:03 PM	BCl3 MFC set to  0.000000
2/14/2013	3:40:03 PM	PH3 MFC set to  0.000000
2/14/2013	3:40:03 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:40:03 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:40:03 PM	Tube furnace set to 0
2/14/2013	3:40:33 PM	H2 valve closed
2/14/2013	3:40:33 PM	BCl3 valve closed
2/14/2013	3:40:33 PM	PH3 valve closed
2/14/2013	3:40:33 PM	SiCl4 pre valve closed
2/14/2013	3:40:33 PM	SiCl4 post valve closed
2/14/2013	3:40:33 PM	Bypass valve closed
2/14/2013	3:40:33 PM	Bubbler valve closed
2/14/2013	3:40:33 PM	Helium valve opened
2/14/2013	3:40:33 PM	Main Vac valve opened
2/14/2013	3:40:33 PM	Helium MFC set to  20.000000
2/14/2013	3:40:33 PM	H2 MFC set to  0.000000
2/14/2013	3:40:33 PM	BCl3 MFC set to  0.000000
2/14/2013	3:40:33 PM	PH3 MFC set to  0.000000
2/14/2013	3:40:33 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:40:33 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:40:34 PM	Tube furnace set to 0
2/14/2013	3:41:04 PM	Helium valve closed
2/14/2013	3:41:04 PM	H2 valve closed
2/14/2013	3:41:04 PM	BCl3 valve closed
2/14/2013	3:41:04 PM	PH3 valve closed
2/14/2013	3:41:04 PM	SiCl4 pre valve closed
2/14/2013	3:41:04 PM	SiCl4 post valve closed
2/14/2013	3:41:04 PM	Bypass valve closed
2/14/2013	3:41:04 PM	Bubbler valve closed
2/14/2013	3:41:04 PM	Main Vac valve opened
2/14/2013	3:41:04 PM	Helium MFC set to  0.000000
2/14/2013	3:41:04 PM	H2 MFC set to  0.000000
2/14/2013	3:41:04 PM	BCl3 MFC set to  0.000000
2/14/2013	3:41:04 PM	PH3 MFC set to  0.000000
2/14/2013	3:41:04 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:41:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:41:04 PM	Tube furnace set to 0
2/14/2013	3:41:34 PM	H2 valve closed
2/14/2013	3:41:34 PM	BCl3 valve closed
2/14/2013	3:41:34 PM	PH3 valve closed
2/14/2013	3:41:34 PM	SiCl4 pre valve closed
2/14/2013	3:41:34 PM	SiCl4 post valve closed
2/14/2013	3:41:34 PM	Bypass valve closed
2/14/2013	3:41:34 PM	Bubbler valve closed
2/14/2013	3:41:34 PM	Helium valve opened
2/14/2013	3:41:34 PM	Main Vac valve opened
2/14/2013	3:41:34 PM	Helium MFC set to  20.000000
2/14/2013	3:41:34 PM	H2 MFC set to  0.000000
2/14/2013	3:41:34 PM	BCl3 MFC set to  0.000000
2/14/2013	3:41:34 PM	PH3 MFC set to  0.000000
2/14/2013	3:41:34 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:41:34 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:41:34 PM	Tube furnace set to 0
2/14/2013	3:42:04 PM	Helium valve closed
2/14/2013	3:42:04 PM	H2 valve closed
2/14/2013	3:42:04 PM	BCl3 valve closed
2/14/2013	3:42:04 PM	PH3 valve closed
2/14/2013	3:42:04 PM	SiCl4 pre valve closed
2/14/2013	3:42:04 PM	SiCl4 post valve closed
2/14/2013	3:42:04 PM	Bypass valve closed
2/14/2013	3:42:04 PM	Bubbler valve closed
2/14/2013	3:42:04 PM	Main Vac valve opened
2/14/2013	3:42:04 PM	Helium MFC set to  0.000000
2/14/2013	3:42:04 PM	H2 MFC set to  0.000000
2/14/2013	3:42:04 PM	BCl3 MFC set to  0.000000
2/14/2013	3:42:04 PM	PH3 MFC set to  0.000000
2/14/2013	3:42:04 PM	SiCl4 MFC set to  0.000000
2/14/2013	3:42:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	3:42:04 PM	Tube furnace set to 0
2/14/2013	3:42:05 PM	Run finished at 3:42 PM
2/14/2013	3:42:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/14/2013	4:31:49 PM	Main Vac valve closed
2/14/2013	4:32:01 PM	Main Vac valve opened
2/14/2013	4:34:35 PM	Recipe started at 4:34 PM
2/14/2013	4:34:35 PM	Helium valve closed
2/14/2013	4:34:35 PM	H2 valve closed
2/14/2013	4:34:35 PM	BCl3 valve closed
2/14/2013	4:34:35 PM	PH3 valve closed
2/14/2013	4:34:35 PM	SiCl4 pre valve closed
2/14/2013	4:34:35 PM	SiCl4 post valve closed
2/14/2013	4:34:35 PM	Main Vac valve closed
2/14/2013	4:34:35 PM	Bypass valve closed
2/14/2013	4:34:35 PM	Bubbler valve closed
2/14/2013	4:34:35 PM	Helium MFC set to  0.000000
2/14/2013	4:34:35 PM	H2 MFC set to  0.000000
2/14/2013	4:34:35 PM	BCl3 MFC set to  0.000000
2/14/2013	4:34:35 PM	PH3 MFC set to  0.000000
2/14/2013	4:34:35 PM	SiCl4 MFC set to  0.000000
2/14/2013	4:34:35 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:34:35 PM	Tube furnace set to 0
2/14/2013	4:34:38 PM	Helium valve closed
2/14/2013	4:34:38 PM	BCl3 valve closed
2/14/2013	4:34:38 PM	PH3 valve closed
2/14/2013	4:34:38 PM	SiCl4 pre valve closed
2/14/2013	4:34:38 PM	SiCl4 post valve closed
2/14/2013	4:34:38 PM	Main Vac valve closed
2/14/2013	4:34:38 PM	Bypass valve closed
2/14/2013	4:34:38 PM	Bubbler valve closed
2/14/2013	4:34:38 PM	H2 valve opened
2/14/2013	4:34:38 PM	Helium MFC set to  0.000000
2/14/2013	4:34:38 PM	H2 MFC set to  500.000000
2/14/2013	4:34:38 PM	BCl3 MFC set to  0.000000
2/14/2013	4:34:38 PM	PH3 MFC set to  0.000000
2/14/2013	4:34:38 PM	SiCl4 MFC set to  0.000000
2/14/2013	4:34:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:34:38 PM	Tube furnace set to 0
2/14/2013	4:35:50 PM	Helium valve closed
2/14/2013	4:35:50 PM	BCl3 valve closed
2/14/2013	4:35:50 PM	PH3 valve closed
2/14/2013	4:35:50 PM	SiCl4 pre valve closed
2/14/2013	4:35:50 PM	SiCl4 post valve closed
2/14/2013	4:35:50 PM	Main Vac valve closed
2/14/2013	4:35:50 PM	Bypass valve closed
2/14/2013	4:35:51 PM	H2 valve opened
2/14/2013	4:35:51 PM	Bubbler valve opened
2/14/2013	4:35:51 PM	Helium MFC set to  0.000000
2/14/2013	4:35:51 PM	H2 MFC set to  500.000000
2/14/2013	4:35:51 PM	BCl3 MFC set to  0.000000
2/14/2013	4:35:51 PM	PH3 MFC set to  0.000000
2/14/2013	4:35:51 PM	SiCl4 MFC set to  0.000000
2/14/2013	4:35:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:35:51 PM	Tube furnace set to 0
2/14/2013	4:35:52 PM	Helium valve closed
2/14/2013	4:35:52 PM	BCl3 valve closed
2/14/2013	4:35:52 PM	PH3 valve closed
2/14/2013	4:35:52 PM	SiCl4 pre valve closed
2/14/2013	4:35:52 PM	SiCl4 post valve closed
2/14/2013	4:35:52 PM	Main Vac valve closed
2/14/2013	4:35:52 PM	Bypass valve closed
2/14/2013	4:35:52 PM	H2 valve opened
2/14/2013	4:35:52 PM	Bubbler valve opened
2/14/2013	4:35:52 PM	Helium MFC set to  0.000000
2/14/2013	4:35:52 PM	H2 MFC set to  500.000000
2/14/2013	4:35:52 PM	BCl3 MFC set to  0.000000
2/14/2013	4:35:52 PM	PH3 MFC set to  0.000000
2/14/2013	4:35:52 PM	SiCl4 MFC set to  0.000000
2/14/2013	4:35:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:35:52 PM	Tube furnace set to 1000
2/14/2013	4:55:52 PM	Helium valve closed
2/14/2013	4:55:52 PM	BCl3 valve closed
2/14/2013	4:55:52 PM	Main Vac valve closed
2/14/2013	4:55:52 PM	Bypass valve closed
2/14/2013	4:55:52 PM	H2 valve opened
2/14/2013	4:55:52 PM	PH3 valve opened
2/14/2013	4:55:52 PM	SiCl4 pre valve opened
2/14/2013	4:55:52 PM	SiCl4 post valve opened
2/14/2013	4:55:52 PM	Bubbler valve opened
2/14/2013	4:55:52 PM	Helium MFC set to  0.000000
2/14/2013	4:55:52 PM	H2 MFC set to  450.000000
2/14/2013	4:55:52 PM	BCl3 MFC set to  0.000000
2/14/2013	4:55:52 PM	PH3 MFC set to  20.000000
2/14/2013	4:55:52 PM	SiCl4 MFC set to  50.000000
2/14/2013	4:55:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:55:52 PM	Tube furnace set to 1000
2/14/2013	4:58:22 PM	Helium valve closed
2/14/2013	4:58:22 PM	BCl3 valve closed
2/14/2013	4:58:22 PM	Main Vac valve closed
2/14/2013	4:58:22 PM	Bypass valve closed
2/14/2013	4:58:22 PM	H2 valve opened
2/14/2013	4:58:22 PM	PH3 valve opened
2/14/2013	4:58:22 PM	SiCl4 pre valve opened
2/14/2013	4:58:22 PM	SiCl4 post valve opened
2/14/2013	4:58:22 PM	Bubbler valve opened
2/14/2013	4:58:22 PM	Helium MFC set to  0.000000
2/14/2013	4:58:22 PM	H2 MFC set to  450.000000
2/14/2013	4:58:22 PM	BCl3 MFC set to  0.000000
2/14/2013	4:58:22 PM	PH3 MFC set to  1.300000
2/14/2013	4:58:22 PM	SiCl4 MFC set to  50.000000
2/14/2013	4:58:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	4:58:22 PM	Tube furnace set to 1000
2/14/2013	5:15:52 PM	Helium valve closed
2/14/2013	5:15:52 PM	BCl3 valve closed
2/14/2013	5:15:52 PM	PH3 valve closed
2/14/2013	5:15:52 PM	SiCl4 pre valve closed
2/14/2013	5:15:52 PM	SiCl4 post valve closed
2/14/2013	5:15:52 PM	Main Vac valve closed
2/14/2013	5:15:53 PM	Bypass valve closed
2/14/2013	5:15:53 PM	H2 valve opened
2/14/2013	5:15:53 PM	Bubbler valve opened
2/14/2013	5:15:53 PM	Helium MFC set to  0.000000
2/14/2013	5:15:53 PM	H2 MFC set to  500.000000
2/14/2013	5:15:53 PM	BCl3 MFC set to  0.000000
2/14/2013	5:15:53 PM	PH3 MFC set to  0.000000
2/14/2013	5:15:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:15:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:15:53 PM	Tube furnace set to 900
2/14/2013	5:20:53 PM	Helium valve closed
2/14/2013	5:20:53 PM	BCl3 valve closed
2/14/2013	5:20:53 PM	PH3 valve closed
2/14/2013	5:20:53 PM	SiCl4 pre valve closed
2/14/2013	5:20:53 PM	SiCl4 post valve closed
2/14/2013	5:20:53 PM	Main Vac valve closed
2/14/2013	5:20:53 PM	Bypass valve closed
2/14/2013	5:20:53 PM	H2 valve opened
2/14/2013	5:20:53 PM	Bubbler valve opened
2/14/2013	5:20:53 PM	Helium MFC set to  0.000000
2/14/2013	5:20:53 PM	H2 MFC set to  500.000000
2/14/2013	5:20:53 PM	BCl3 MFC set to  0.000000
2/14/2013	5:20:53 PM	PH3 MFC set to  0.000000
2/14/2013	5:20:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:20:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:20:53 PM	Tube furnace set to 800
2/14/2013	5:25:53 PM	Helium valve closed
2/14/2013	5:25:53 PM	BCl3 valve closed
2/14/2013	5:25:53 PM	PH3 valve closed
2/14/2013	5:25:53 PM	SiCl4 pre valve closed
2/14/2013	5:25:53 PM	SiCl4 post valve closed
2/14/2013	5:25:53 PM	Main Vac valve closed
2/14/2013	5:25:53 PM	Bypass valve closed
2/14/2013	5:25:53 PM	H2 valve opened
2/14/2013	5:25:53 PM	Bubbler valve opened
2/14/2013	5:25:53 PM	Helium MFC set to  0.000000
2/14/2013	5:25:53 PM	H2 MFC set to  500.000000
2/14/2013	5:25:53 PM	BCl3 MFC set to  0.000000
2/14/2013	5:25:53 PM	PH3 MFC set to  0.000000
2/14/2013	5:25:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:25:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:25:53 PM	Tube furnace set to 700
2/14/2013	5:30:53 PM	Helium valve closed
2/14/2013	5:30:53 PM	BCl3 valve closed
2/14/2013	5:30:53 PM	PH3 valve closed
2/14/2013	5:30:53 PM	SiCl4 pre valve closed
2/14/2013	5:30:53 PM	SiCl4 post valve closed
2/14/2013	5:30:53 PM	Main Vac valve closed
2/14/2013	5:30:53 PM	Bypass valve closed
2/14/2013	5:30:53 PM	H2 valve opened
2/14/2013	5:30:53 PM	Bubbler valve opened
2/14/2013	5:30:53 PM	Helium MFC set to  0.000000
2/14/2013	5:30:53 PM	H2 MFC set to  500.000000
2/14/2013	5:30:53 PM	BCl3 MFC set to  0.000000
2/14/2013	5:30:53 PM	PH3 MFC set to  0.000000
2/14/2013	5:30:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:30:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:30:53 PM	Tube furnace set to 600
2/14/2013	5:35:53 PM	H2 valve closed
2/14/2013	5:35:53 PM	BCl3 valve closed
2/14/2013	5:35:53 PM	PH3 valve closed
2/14/2013	5:35:53 PM	SiCl4 pre valve closed
2/14/2013	5:35:53 PM	SiCl4 post valve closed
2/14/2013	5:35:53 PM	Main Vac valve closed
2/14/2013	5:35:53 PM	Bypass valve closed
2/14/2013	5:35:53 PM	Helium valve opened
2/14/2013	5:35:53 PM	Bubbler valve opened
2/14/2013	5:35:53 PM	Helium MFC set to  500.000000
2/14/2013	5:35:53 PM	H2 MFC set to  0.000000
2/14/2013	5:35:53 PM	BCl3 MFC set to  0.000000
2/14/2013	5:35:53 PM	PH3 MFC set to  0.000000
2/14/2013	5:35:53 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:35:53 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:35:54 PM	Tube furnace set to 0
2/14/2013	5:55:54 PM	Helium valve closed
2/14/2013	5:55:54 PM	H2 valve closed
2/14/2013	5:55:54 PM	BCl3 valve closed
2/14/2013	5:55:54 PM	PH3 valve closed
2/14/2013	5:55:54 PM	SiCl4 pre valve closed
2/14/2013	5:55:54 PM	SiCl4 post valve closed
2/14/2013	5:55:54 PM	Main Vac valve closed
2/14/2013	5:55:54 PM	Bypass valve closed
2/14/2013	5:55:54 PM	Bubbler valve closed
2/14/2013	5:55:54 PM	Helium MFC set to  0.000000
2/14/2013	5:55:54 PM	H2 MFC set to  0.000000
2/14/2013	5:55:54 PM	BCl3 MFC set to  0.000000
2/14/2013	5:55:54 PM	PH3 MFC set to  0.000000
2/14/2013	5:55:54 PM	SiCl4 MFC set to  0.000000
2/14/2013	5:55:54 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	5:55:54 PM	Tube furnace set to 0
2/14/2013	5:55:55 PM	Run finished at 5:55 PM
2/14/2013	6:10:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	6:10:42 PM	Recipe started at 6:10 PM
2/14/2013	6:10:42 PM	Helium valve closed
2/14/2013	6:10:42 PM	H2 valve closed
2/14/2013	6:10:42 PM	BCl3 valve closed
2/14/2013	6:10:42 PM	PH3 valve closed
2/14/2013	6:10:42 PM	SiCl4 pre valve closed
2/14/2013	6:10:42 PM	SiCl4 post valve closed
2/14/2013	6:10:42 PM	Main Vac valve closed
2/14/2013	6:10:42 PM	Bypass valve closed
2/14/2013	6:10:42 PM	Bubbler valve closed
2/14/2013	6:10:42 PM	Helium MFC set to  0.000000
2/14/2013	6:10:42 PM	H2 MFC set to  0.000000
2/14/2013	6:10:42 PM	BCl3 MFC set to  0.000000
2/14/2013	6:10:42 PM	PH3 MFC set to  0.000000
2/14/2013	6:10:42 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:10:42 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:10:42 PM	Tube furnace set to 0
2/14/2013	6:10:45 PM	H2 valve closed
2/14/2013	6:10:45 PM	BCl3 valve closed
2/14/2013	6:10:45 PM	PH3 valve closed
2/14/2013	6:10:45 PM	SiCl4 pre valve closed
2/14/2013	6:10:45 PM	SiCl4 post valve closed
2/14/2013	6:10:45 PM	Main Vac valve closed
2/14/2013	6:10:45 PM	Bypass valve closed
2/14/2013	6:10:45 PM	Bubbler valve closed
2/14/2013	6:10:45 PM	Helium valve opened
2/14/2013	6:10:45 PM	Helium MFC set to  500.000000
2/14/2013	6:10:45 PM	H2 MFC set to  0.000000
2/14/2013	6:10:45 PM	BCl3 MFC set to  0.000000
2/14/2013	6:10:45 PM	PH3 MFC set to  0.000000
2/14/2013	6:10:45 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:10:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:10:46 PM	Tube furnace set to 0
2/14/2013	6:10:46 PM	Helium valve closed
2/14/2013	6:10:46 PM	H2 valve closed
2/14/2013	6:10:46 PM	BCl3 valve closed
2/14/2013	6:10:46 PM	PH3 valve closed
2/14/2013	6:10:46 PM	SiCl4 pre valve closed
2/14/2013	6:10:46 PM	SiCl4 post valve closed
2/14/2013	6:10:46 PM	Main Vac valve closed
2/14/2013	6:10:46 PM	Bypass valve closed
2/14/2013	6:10:46 PM	Bubbler valve closed
2/14/2013	6:10:46 PM	Helium MFC set to  0.000000
2/14/2013	6:10:46 PM	H2 MFC set to  0.000000
2/14/2013	6:10:46 PM	BCl3 MFC set to  0.000000
2/14/2013	6:10:46 PM	PH3 MFC set to  0.000000
2/14/2013	6:10:46 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:10:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:10:46 PM	Tube furnace set to 0
2/14/2013	6:10:47 PM	Run finished at 6:10 PM
2/14/2013	6:10:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2013	6:13:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2013	6:13:26 PM	Recipe started at 6:13 PM
2/14/2013	6:13:26 PM	Helium valve closed
2/14/2013	6:13:26 PM	H2 valve closed
2/14/2013	6:13:26 PM	BCl3 valve closed
2/14/2013	6:13:26 PM	PH3 valve closed
2/14/2013	6:13:26 PM	SiCl4 pre valve closed
2/14/2013	6:13:26 PM	SiCl4 post valve closed
2/14/2013	6:13:26 PM	Main Vac valve closed
2/14/2013	6:13:26 PM	Bubbler valve closed
2/14/2013	6:13:26 PM	Bypass valve opened
2/14/2013	6:13:26 PM	Helium MFC set to  0.000000
2/14/2013	6:13:26 PM	H2 MFC set to  0.000000
2/14/2013	6:13:26 PM	BCl3 MFC set to  0.000000
2/14/2013	6:13:26 PM	PH3 MFC set to  0.000000
2/14/2013	6:13:26 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:13:26 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:13:27 PM	Tube furnace set to 0
2/14/2013	6:14:38 PM	Helium valve closed
2/14/2013	6:14:38 PM	H2 valve closed
2/14/2013	6:14:38 PM	BCl3 valve closed
2/14/2013	6:14:38 PM	PH3 valve closed
2/14/2013	6:14:38 PM	SiCl4 pre valve closed
2/14/2013	6:14:38 PM	SiCl4 post valve closed
2/14/2013	6:14:38 PM	Main Vac valve closed
2/14/2013	6:14:38 PM	Bubbler valve closed
2/14/2013	6:14:38 PM	Bypass valve opened
2/14/2013	6:14:38 PM	Helium MFC set to  0.000000
2/14/2013	6:14:38 PM	H2 MFC set to  0.000000
2/14/2013	6:14:38 PM	BCl3 MFC set to  0.000000
2/14/2013	6:14:38 PM	PH3 MFC set to  0.000000
2/14/2013	6:14:38 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:14:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:14:38 PM	Tube furnace set to 0
2/14/2013	6:15:38 PM	Helium valve closed
2/14/2013	6:15:38 PM	H2 valve closed
2/14/2013	6:15:38 PM	BCl3 valve closed
2/14/2013	6:15:38 PM	PH3 valve closed
2/14/2013	6:15:38 PM	SiCl4 pre valve closed
2/14/2013	6:15:38 PM	SiCl4 post valve closed
2/14/2013	6:15:38 PM	Bypass valve closed
2/14/2013	6:15:38 PM	Bubbler valve closed
2/14/2013	6:15:38 PM	Main Vac valve opened
2/14/2013	6:15:38 PM	Helium MFC set to  0.000000
2/14/2013	6:15:38 PM	H2 MFC set to  0.000000
2/14/2013	6:15:38 PM	BCl3 MFC set to  0.000000
2/14/2013	6:15:38 PM	PH3 MFC set to  0.000000
2/14/2013	6:15:38 PM	SiCl4 MFC set to  0.000000
2/14/2013	6:15:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2013	6:15:39 PM	Tube furnace set to 0
2/14/2013	6:15:40 PM	Run finished at 6:15 PM
2/14/2013	6:15:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
